Reactive magnetron sputtering of Al doped ZnO films: dependence of optical, electrical, compositional and structural properties on deposition conditions

1993 ◽  
Vol 70-71 ◽  
pp. 707-711 ◽  
Author(s):  
K. Ellmer ◽  
F. Kudella ◽  
R. Mientus ◽  
R. Schieck ◽  
S. Fiechter
Keyword(s):  
Magnetron Sputtering ◽  
Structural Properties ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Doped Zno ◽  
Deposition Conditions

scholarly journals Magnetic properties of Er-doped ZnO films prepared by reactive magnetron sputtering

2010 ◽  
Vol 100 (1) ◽  
pp. 79-82 ◽  
Author(s):  
Jing Qi ◽  
Daqiang Gao ◽  
Jinhong Liu ◽  
Wenge Yang ◽  
Qi Wang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Doped Zno ◽  
Er Doped

Transparent conductive Tb-doped ZnO films prepared by rf reactive magnetron sputtering

2005 ◽  
Vol 59 (21) ◽  
pp. 2611-2614 ◽  
Author(s):  
Z.B. Fang ◽  
Y.S. Tan ◽  
H.X. Gong ◽  
C.M. Zhen ◽  
Z.W. He ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Doped Zno

Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in Mid-Frequency Mode with Dual Cathodes

2002 ◽  
Vol 41 (Part 1, No. 2A) ◽  
pp. 814-819 ◽  
Author(s):  
Masato Kon ◽  
Pung Keun Song ◽  
Yuzo Shigesato ◽  
Peter Frach ◽  
Akio Mizukami ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Frequency Mode ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Doped Zno
Sign in / Sign up

Export Citation Format

Share Document