Optimization of parameters for deposition of Ga-doped ZnO films by DC reactive magnetron sputtering using Taguchi method

2011 ◽  
Vol 257 (14) ◽  
pp. 6125-6128 ◽  
Author(s):  
Xun Bie ◽  
Jianguo Lu ◽  
Yuping Wang ◽  
Li Gong ◽  
Quanbao Ma ◽  
...  
Keyword(s):  
Taguchi Method ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Optimization Of Parameters ◽  
Dc Reactive Magnetron Sputtering ◽  
Doped Zno

scholarly journals Magnetic properties of Er-doped ZnO films prepared by reactive magnetron sputtering

2010 ◽  
Vol 100 (1) ◽  
pp. 79-82 ◽  
Author(s):  
Jing Qi ◽  
Daqiang Gao ◽  
Jinhong Liu ◽  
Wenge Yang ◽  
Qi Wang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Doped Zno ◽  
Er Doped
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