Multilayered titanium tungsten nitride coatings with a superlattice structure grown by unbalanced magnetron sputtering

1995 ◽  
Vol 76-77 ◽  
pp. 159-166 ◽  
Author(s):  
T. Hurkmans ◽  
T. Trinh ◽  
D.B. Lewis ◽  
J.S. Brooks ◽  
W.-D. Münz
Keyword(s):  
Magnetron Sputtering ◽  
Tungsten Nitride ◽  
Superlattice Structure ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Nitride Coatings

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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