Microstructural Evolution in the Oxidized Chromium Nitride Coatings Prepared by Unbalanced Magnetron Sputtering

2003 ◽  
Vol 150 (5) ◽  
pp. B199 ◽  
Author(s):  
C. C. Wang ◽  
W. P. Hsieh ◽  
M. H. Shiao ◽  
J. H. Lin ◽  
F. S. Shieu
Keyword(s):  
Magnetron Sputtering ◽  
Microstructural Evolution ◽  
Chromium Nitride ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Nitride Coatings

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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