Iterative reduction of gain variations in parallel electron energy loss spectrometry

1993 ◽  
Vol 49 (1-4) ◽  
pp. 179-188 ◽  
Author(s):  
Peter Schattschneider ◽  
Peter Jonas
1992 ◽  
Vol 259 ◽  
Author(s):  
Selmer S. Wong ◽  
Shouleh Nikzad ◽  
Channing C. Ahn ◽  
Aimee L. Smith ◽  
Harry A. Atwater

ABSTRACTWe have employed reflection electron energy loss spectrometry (REELS), a surface chemical analysis technique, in order to analyze contaminant coverages at the submonolayer level during low-temperature in situ cleaning of hydrogen-terminated Si(100). The chemical composition of the surface was analyzed by measurements of the C K, O K and Si L2,3 core loss intensities at various stages of the cleaning. These results were quantified using SiC(100) and SiO2 as reference standards for C and O coverage. Room temperature REELS core loss intensity analysis after sample insertion reveals carbon at fractional monolayer coverage. We have established the REELS detection limit for carbon coverage to be 5±2% of a monolayer. A study of temperature-dependent hydrocarbon desorption from hydrogen-terminated Si(100) reveals the absence of carbon on the surface at temperatures greater than 200°C. This indicates the feasibility of epitaxial growth following an in situ low-temperature cleaning and also indicates the power of REELS as an in situ technique for assessment of surface cleanliness.


Author(s):  
M Stöger-Pollach ◽  
C Hébert ◽  
E C Karl-Rückert ◽  
P Schattschneider ◽  
B Rau ◽  
...  

1990 ◽  
Vol 359 ◽  
pp. 246 ◽  
Author(s):  
Thomas J. Bernatowicz ◽  
Patrick C. Gibbons ◽  
Roy S. Lewis

2000 ◽  
Vol 77 (2) ◽  
pp. 238-240 ◽  
Author(s):  
A. Hightower ◽  
C. C. Ahn ◽  
B. Fultz ◽  
P. Rez

1979 ◽  
Vol 61 (2) ◽  
pp. L1-L4 ◽  
Author(s):  
Chr. Weissmantel ◽  
K. Bewilogua ◽  
C. Schürer ◽  
K. Breuer ◽  
H. Zscheile

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