Microanalysis of light elements by electron energy loss spectrometry

1978 ◽  
Vol 13 (5) ◽  
pp. 389-397 ◽  
Author(s):  
R.F. Egerton
Author(s):  
R. M. Anderson ◽  
A. Kumar

The identification of unknown phases in crystallized glasses or ceramics has been difficult because the phases are generally composed of many elements; they crystallize into low-symmetry lattices; they contain numerous impurities, which may alter crystal structure or allow the observation of metastable phases; and they are not well represented in standard compilations of crystal data. Compounding the problem is the fact that energy- dispersive x-ray analysis (EDX) for elemental content can not be employed for elements with Z<11. This eliminates any possibility of qualitative analysis of the important Li, Be, and B glasses as well as determination of O, C and N content. Electron Energy Loss Spectrometry (ELS) has been shown to be a powerful method for the analysis of light elements. The ELS method is far more efficient at detecting light elements than x-ray detection, because the yield of energy loss electrons to inner shell excitation and ionizations is unity and because the electrons, which have lost energy encountering the sample, are scattered through very small angles, with the result that collection efficiencies are high.


1992 ◽  
Vol 259 ◽  
Author(s):  
Selmer S. Wong ◽  
Shouleh Nikzad ◽  
Channing C. Ahn ◽  
Aimee L. Smith ◽  
Harry A. Atwater

ABSTRACTWe have employed reflection electron energy loss spectrometry (REELS), a surface chemical analysis technique, in order to analyze contaminant coverages at the submonolayer level during low-temperature in situ cleaning of hydrogen-terminated Si(100). The chemical composition of the surface was analyzed by measurements of the C K, O K and Si L2,3 core loss intensities at various stages of the cleaning. These results were quantified using SiC(100) and SiO2 as reference standards for C and O coverage. Room temperature REELS core loss intensity analysis after sample insertion reveals carbon at fractional monolayer coverage. We have established the REELS detection limit for carbon coverage to be 5±2% of a monolayer. A study of temperature-dependent hydrocarbon desorption from hydrogen-terminated Si(100) reveals the absence of carbon on the surface at temperatures greater than 200°C. This indicates the feasibility of epitaxial growth following an in situ low-temperature cleaning and also indicates the power of REELS as an in situ technique for assessment of surface cleanliness.


Author(s):  
M Stöger-Pollach ◽  
C Hébert ◽  
E C Karl-Rückert ◽  
P Schattschneider ◽  
B Rau ◽  
...  

1990 ◽  
Vol 359 ◽  
pp. 246 ◽  
Author(s):  
Thomas J. Bernatowicz ◽  
Patrick C. Gibbons ◽  
Roy S. Lewis

2000 ◽  
Vol 77 (2) ◽  
pp. 238-240 ◽  
Author(s):  
A. Hightower ◽  
C. C. Ahn ◽  
B. Fultz ◽  
P. Rez

Sign in / Sign up

Export Citation Format

Share Document