Isocontour maps of electron temperature, electron number density and gas kinetic temperature in the Ar inductively coupled plasma obtained by laser-light Thomson and Rayleigh scattering

The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5% to 12% and 3% to 13%, respectively.

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Combination of the ionic-to-atomic line intensity ratios from two test elements for the diagnostic of plasma temperature and electron number density in Inductively Coupled Plasma Atomic Emission Spectroscopy

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2007.05.006 ◽

2007 ◽

Vol 62 (5) ◽

pp. 435-443 ◽

Cited By ~ 28

Author(s):

E. Tognoni ◽

M. Hidalgo ◽

A. Canals ◽

G. Cristoforetti ◽

S. Legnaioli ◽

...

Keyword(s):

Inductively Coupled Plasma ◽

Electron Number Density ◽

Plasma Temperature ◽

Atomic Emission ◽

Number Density ◽

Plasma Atomic Emission ◽

Electron Number ◽

Inductively Coupled ◽

Test Elements ◽

Intensity Ratios

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Tandem Helium Plasma Spectrometry with a Capacitively Coupled Discharge Formed above a Helium ICP

Applied Spectroscopy ◽

10.1366/0003702894201770 ◽

1989 ◽

Vol 43 (1) ◽

pp. 92-95 ◽

Cited By ~ 22

Author(s):

Shi-Kit Chan ◽

Hsiaoming Tan ◽

Akbar Montaser

Keyword(s):

Inductively Coupled Plasma ◽

Electron Number Density ◽

Detection Limits ◽

Helium Plasma ◽

Number Density ◽

Electron Number ◽

Capacitively Coupled ◽

Plasma Spectrometry ◽

Inductively Coupled

A tandem helium plasma was formed by placing a water-cooled, grounded electrode above a helium inductively coupled plasma (He ICP). The tandem plasma could be operated at 250 to 700 W. Detection limits of F, Cl, Br, S, and C at 500 W were comparable or superior to those from a He ICP operated at 1500 W. At 500 W, the electron number density for the tandem helium plasma was greater than that for the He ICP at 1500 W, but similar excitation temperatures and roughly similar rotational temperatures were obtained.

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Electron number density in a slightly ionized gas (argon inductively coupled plasma)

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(93)80140-p ◽

1993 ◽

Vol 48 (12) ◽

pp. 1537-1549 ◽

Cited By ~ 8

Author(s):

Frank R. Meeks

Keyword(s):

Inductively Coupled Plasma ◽

Electron Number Density ◽

Number Density ◽

Electron Number ◽

Ionized Gas ◽

Inductively Coupled

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Development of Simple Designs of Multitip Probe Diagnostic Systems for RF Plasma Characterization

The Scientific World JOURNAL ◽

10.1155/2014/279868 ◽

2014 ◽

Vol 2014 ◽

pp. 1-8 ◽

Cited By ~ 2

Author(s):

M. Y. Naz ◽

S. Shukrullah ◽

A. Ghaffar ◽

N. U. Rehman

Keyword(s):

Radio Frequency ◽

Electron Temperature ◽

Inductively Coupled Plasma ◽

Electron Number Density ◽

Gas Pressure ◽

Rf Plasma ◽

Number Density ◽

Diagnostic Systems ◽

Electron Number ◽

Double Probe

Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip probes for parametric study of radio frequency plasmas. For this purpose, symmetric double probe, asymmetric double probe, and symmetric triple probe diagnostic systems and their driving circuits were designed and tested in an inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. UsingI-Vcharacteristics of these probes, electron temperature, electron number density, and ion saturation current was measured as a function of input power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density for increasing input RF power whilst a decreasing trend was evident in these parameters when measured against filling gas pressure. In addition, the electron energy probability function (EEPF) was also studied by using an asymmetric double probe. These studies confirmed the non-Maxwellian nature of the EEPF and the presence of two groups of the energetic electrons at low filling gas pressures.

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