Design considerations for plasma immersion ion implantation systems
1996 ◽
Vol 85
(1-2)
◽
pp. 64-69
◽
Keyword(s):
1996 ◽
Vol 112
(1-4)
◽
pp. 252-254
◽
2020 ◽
Vol 1695
◽
pp. 012009
2007 ◽
Vol 201
(15)
◽
pp. 6615-6618
◽
Keyword(s):
2007 ◽
Vol 50
(5-6)
◽
pp. 789-798
◽
2000 ◽
Vol 28
(5)
◽
pp. 1392-1396
◽
2009 ◽
Vol 267
(8-9)
◽
pp. 1696-1700
◽