A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation
2007 ◽
Vol 50
(5-6)
◽
pp. 789-798
◽
2020 ◽
Vol 1695
◽
pp. 012009
2007 ◽
Vol 201
(15)
◽
pp. 6615-6618
◽
Keyword(s):
2000 ◽
Vol 28
(5)
◽
pp. 1392-1396
◽
2009 ◽
Vol 267
(8-9)
◽
pp. 1696-1700
◽
2019 ◽
Vol 365
◽
pp. 173-178
◽
2004 ◽
Vol 186
(1-2)
◽
pp. 204-208
◽