A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation

2007 ◽  
Vol 50 (5-6) ◽  
pp. 789-798 ◽  
Author(s):  
F.B. Yeh
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Vol 201 (15) ◽  
pp. 6615-6618 ◽  
Author(s):  
Tao Sun ◽  
Langping Wang ◽  
Yonghao Yu ◽  
Yuhang Wang ◽  
Xiaofeng Wang ◽  
...  

2000 ◽  
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Author(s):  
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M. Ueda ◽  
J.J. Barroso ◽  
V.A. Spassov

2019 ◽  
Vol 365 ◽  
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Author(s):  
Duen-Kai Shiau ◽  
Chih-Hsiung Yang ◽  
Ying-Sui Sun ◽  
Mei-Fang Wu ◽  
Haobo Pan ◽  
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2004 ◽  
Vol 186 (1-2) ◽  
pp. 204-208 ◽  
Author(s):  
K.G Kostov ◽  
M Ueda ◽  
M Lepiensky ◽  
P.C Soares ◽  
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...  

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