PRODUCTION OF LARGE VOLUME CYLINDRICAL RF PLASMA USING CIRCULAR MAGNETIC LINE CUSP FIELD

Author(s):  
K. YAMAUCHI ◽  
M. SHIBAGAKI ◽  
A. KONO ◽  
K. TAKAHASHI ◽  
T. SHEBUYA ◽  
...  
Keyword(s):  
1993 ◽  
Vol 5 (1) ◽  
pp. c35-c36
Author(s):  
Keiji Takahashi ◽  
Eiji Yabe ◽  
Kazuo Takayama

1993 ◽  
Vol 64 (9) ◽  
pp. 2434-2439 ◽  
Author(s):  
Kazuo Yamauchi ◽  
Keiji Takahashi ◽  
Eiji Yabe

2001 ◽  
Vol 136 (1-3) ◽  
pp. 60-64 ◽  
Author(s):  
Yuichi Setsuhara ◽  
Shoji Miyake ◽  
Yoichi Sakawa ◽  
Tatsuo Shoji

1994 ◽  
Vol 65 (4) ◽  
pp. 1365-1367 ◽  
Author(s):  
Eiji Yabe ◽  
Keiji Takahashi ◽  
Kazuo Takayama

1994 ◽  
Vol 33 (Part 1, No. 3A) ◽  
pp. 1538-1542 ◽  
Author(s):  
Eiji Yabe ◽  
Keiji Takahashi ◽  
Kazuo Takayama
Keyword(s):  

Author(s):  
D.P. Malta ◽  
S.A. Willard ◽  
R.A. Rudder ◽  
G.C. Hudson ◽  
J.B. Posthill ◽  
...  

Semiconducting diamond films have the potential for use as a material in which to build active electronic devices capable of operating at high temperatures or in high radiation environments. A major goal of current device-related diamond research is to achieve a high quality epitaxial film on an inexpensive, readily available, non-native substrate. One step in the process of achieving this goal is understanding the nucleation and growth processes of diamond films on diamond substrates. Electron microscopy has already proven invaluable for assessing polycrystalline diamond films grown on nonnative surfaces.The quality of the grown diamond film depends on several factors, one of which is the quality of the diamond substrate. Substrates commercially available today have often been found to have scratched surfaces resulting from the polishing process (Fig. 1a). Electron beam-induced current (EBIC) imaging shows that electrically active sub-surface defects can be present to a large degree (Fig. 1c). Growth of homoepitaxial diamond films by rf plasma-enhanced chemical vapor deposition (PECVD) has been found to planarize the scratched substrate surface (Fig. 1b).


1999 ◽  
Vol 9 (1) ◽  
pp. 5-6
Author(s):  
Carrie Bain ◽  
Nan Bernstein Ratner

Due to the large volume of fluency-related publications since the last column, we have chosen to highlight those articles of highest potential clinical relevance.


2001 ◽  
Vol 120 (5) ◽  
pp. A482-A482
Author(s):  
R MONDRAGONSANCHEZ ◽  
A GARDUOLOPEZ ◽  
H MURRIETA ◽  
M FRIASMENDIVIL ◽  
R ESPEJO ◽  
...  

2006 ◽  
Vol 175 (4S) ◽  
pp. 488-488
Author(s):  
Frédéric Michel ◽  
Jad Watfa ◽  
Thomas Dubruille

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