Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films
2010 ◽
Vol 256
(7)
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pp. 2189-2192
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2017 ◽
Vol 902
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pp. 012024
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2019 ◽
Vol 14
(7)
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pp. 987-992
1996 ◽
Vol 198-200
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pp. 1072-1075
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2004 ◽
Vol 37
(23)
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pp. 3304-3308
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2003 ◽
Vol 315
(3)
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pp. 312-320
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