Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

2010 ◽  
Vol 256 (7) ◽  
pp. 2189-2192 ◽  
Author(s):  
Yinqiao Peng ◽  
Jicheng Zhou ◽  
Zhichao Zhang ◽  
Baoxing Zhao ◽  
Xiaochao Tan
1996 ◽  
Vol 198-200 ◽  
pp. 1072-1075 ◽  
Author(s):  
S. Al-Dallal ◽  
S. Arekat ◽  
S.M. Al-Alawi ◽  
S. Aljishi ◽  
R. Bannai

Sign in / Sign up

Export Citation Format

Share Document