Fabrication and characterization of La-doped HfO2 gate dielectrics by metal-organic chemical vapor deposition

2010 ◽  
Vol 256 (8) ◽  
pp. 2496-2499 ◽  
Author(s):  
Liu-Ying Huang ◽  
Ai-Dong Li ◽  
Wen-Qi Zhang ◽  
Hui Li ◽  
Yi-Dong Xia ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Gate Dielectrics ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Fabrication And Characterization ◽  
Organic Chemical Vapor Deposition ◽  
La Doped

Growth and characterization of N-polar GaN films on SiC by metal organic chemical vapor deposition

2008 ◽  
Vol 104 (2) ◽  
pp. 024301 ◽  
Author(s):  
David F. Brown ◽  
Stacia Keller ◽  
Feng Wu ◽  
James S. Speck ◽  
Steven P. DenBaars ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Preparation and Characterization of Epitaxial LiNbO3Thin Films by Metal-Organic Chemical Vapor Deposition

1999 ◽  
Vol 38 (Part 1, No. 9B) ◽  
pp. 5437-5441 ◽  
Author(s):  
Kosuke Shiratsuyu ◽  
Atsushi Sakurai ◽  
Katsuhiko Tanaka ◽  
Yukio Sakabe
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

scholarly journals Characterization of YBa2Cu3O7-.DELTA. Films with Different Cu Contents Grown by Metal Organic Chemical Vapor Deposition.

2000 ◽  
Vol 108 (1259) ◽  
pp. 623-626
Author(s):  
Koji ISHIZAWA ◽  
Yutaka YOSHIDA ◽  
Masato HASEGAWA ◽  
Morihiro IWATA ◽  
Katsuya YAMAGIWA ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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