Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering

Vacuum ◽  
2020 ◽  
Vol 181 ◽  
pp. 109706 ◽  
Author(s):  
Liqiang Chen ◽  
Wei Li ◽  
Ping Liu ◽  
Ke Zhang ◽  
Fengcang Ma ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Entropy Alloy ◽  
Reactive Magnetron ◽  
High Entropy ◽  
Microstructure And Mechanical Properties

Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

2011 ◽  
Vol 205 (19) ◽  
pp. 4471-4479 ◽  
Author(s):  
Andrzej Czyżniewski ◽  
Witold Gulbiński ◽  
György Radnóczi ◽  
Marianna Szerencsi ◽  
Mieczysław Pancielejko
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties
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