Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrN x hard coatings deposited by reactive magnetron sputtering

Vacuum ◽  
2017 ◽  
Vol 145 ◽  
pp. 136-143 ◽  
Author(s):  
Zhengbing Qi ◽  
Zhengtao Wu ◽  
Dongfang Zhang ◽  
Binbin Wei ◽  
Jinhuo Wang ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Chemical Composition ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Hard Coatings ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties ◽  
Sputtering Power

Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

2011 ◽  
Vol 205 (19) ◽  
pp. 4471-4479 ◽  
Author(s):  
Andrzej Czyżniewski ◽  
Witold Gulbiński ◽  
György Radnóczi ◽  
Marianna Szerencsi ◽  
Mieczysław Pancielejko
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties
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