Characterization and hydrogen gas sensing properties of TiO2 thin films prepared by sol–gel method

2012 ◽  
Vol 259 ◽  
pp. 270-275 ◽  
Author(s):  
Azhar Ali Haidry ◽  
Jarmila Puskelova ◽  
Tomas Plecenik ◽  
Pavol Durina ◽  
Jan Gregus ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sol Gel ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

Gas-sensing properties of nanostructured TiO2–xZrO2 thin films obtained by the sol–gel method

2019 ◽  
Vol 92 (2) ◽  
pp. 415-426 ◽  
Author(s):  
Artem S. Mokrushin ◽  
Elizaveta P. Simonenko ◽  
Nikolay P. Simonenko ◽  
Kirill A. Bukunov ◽  
Philipp Yu. Gorobtsov ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sol Gel ◽  
Gel Method ◽  
Nanostructured Tio2 ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

Structure of Hydrogen Gas Sensing TiO2 Thin Films Prepared by Sol-Gel Method and their Comparison with Magnetron Sputtered Films

2013 ◽  
Vol 543 ◽  
pp. 293-296 ◽  
Author(s):  
G. Plesch ◽  
A.A. Haidry ◽  
M. Gregor ◽  
P. Durina ◽  
J. Gregus ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Gas Sensing ◽  
Sol Gel ◽  
Rutile Phase ◽  
Hydrogen Gas ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Coating Method

TiO2thin films with a thickness of about 150 nm were deposited by spin coating method on sapphire substrate from a sol-gel system. The hydrogen sensing properties of TiO2films annealed at various temperatures were studied and correlated with their structure, optical and electrical properties. The annealing temperatures in the range of 600 800 °C lead to anatase films with a roughness in the range of 0.6 0.9 nm. Their sensitivity towards hydrogen is low. The thin films annealed at temperatures in the range 900 1000 °C consist of rutile phase and their roughness increased to 11.7 13.5 nm. They showed good hydrogen sensitivity with optimal operating temperature 200 250 °C. The structure and sensing properties of the prepared films are compared with those synthesized with magnetron sputtering. The maximum of sensitivity was measured on the thin films with diameter of the grains about 100 nm in both cases, i.e. on thin films prepared by sol-gel method as well as on thin films prepared by magnetron sputtering. The maximum sensitivity correlates with the diameter of the grains and dont depend on the allotropy of the titanium dioxide anatase or rutile.

Gas-sensing properties of nanostructured CeO2-xZrO2 thin films obtained by the sol-gel method

2019 ◽  
Vol 773 ◽  
pp. 1023-1032 ◽  
Author(s):  
Artem S. Mokrushin ◽  
Elizaveta P. Simonenko ◽  
Nikolay P. Simonenko ◽  
Kirill A. Bukunov ◽  
Vladimir G. Sevastyanov ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sol Gel ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

Structural, optical and NO2 gas sensing properties of ZnMgO thin films prepared by the sol gel method

2017 ◽  
Vol 505 ◽  
pp. 9-16 ◽  
Author(s):  
W. Chebil ◽  
M.A. Boukadhaba ◽  
I. Madhi ◽  
A. Fouzri ◽  
A. Lusson ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sol Gel ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

Microstructure, phase composition, and gas-sensing properties of nanostructured ZrO2-xY2O3 thin films and powders obtained by the sol-gel method

Ionics ◽  
2018 ◽  
Vol 25 (3) ◽  
pp. 1259-1270 ◽  
Author(s):  
Artem S. Mokrushin ◽  
Elizaveta P. Simonenko ◽  
Nikolay P. Simonenko ◽  
Kirill A. Bukunov ◽  
Vladimir G. Sevastyanov ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Composition ◽  
Gas Sensing ◽  
Sol Gel ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

Gas Sensing Properties of Nanocrystalline Indium Oxide Synthesized by Sol–Gel Method

2012 ◽  
Vol 5 (1) ◽  
pp. 109-113 ◽  
Author(s):  
S. C. Kulkarni ◽  
C. S. Aher ◽  
R. Y. Borse ◽  
B. G. Bharate ◽  
SalemS. Al-Deyab ◽  
...  
Keyword(s):  
Indium Oxide ◽  
Gas Sensing ◽  
Sol Gel ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

Hydrogen gas sensors based on nanocrystalline TiO2 thin films

Open Physics ◽  
2011 ◽  
Vol 9 (5) ◽  
Author(s):  
Azhar Haidry ◽  
Peter Schlosser ◽  
Pavol Durina ◽  
Marian Mikula ◽  
Milan Tomasek ◽  
...  
Keyword(s):  
Thin Films ◽  
Annealing Temperature ◽  
Gas Sensing ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Nanocrystalline Tio2 ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Hydrogen Gas Sensors ◽  
Titanium Dioxide Thin Films

AbstractTitanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.

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