Formation and structural features of nitrogen-doped titanium dioxide thin films grown by reactive magnetron sputtering

2020 ◽  
Vol 534 ◽  
pp. 147572 ◽  
Author(s):  
Alla Pustovalova ◽  
Elena Boytsova ◽  
Danagul Aubakirova ◽  
Michael Bruns ◽  
Sergei Tverdokhlebov ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Magnetron Sputtering ◽  
Structural Features ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Nitrogen Doped ◽  
Doped Titanium Dioxide ◽  
Titanium Dioxide Thin Films ◽  
Nitrogen Doped Titanium Dioxide

Structural Changes of Titanium Dioxide Thin Films Deposited by Reactive Magnetron Sputtering through Nitrogen Incorporation

2016 ◽  
Vol 683 ◽  
pp. 383-388 ◽  
Author(s):  
Alla Pustovalova ◽  
Nina Ivanova
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Magnetron Sputtering ◽  
Structural Changes ◽  
Nitrogen Concentration ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Sputtering Deposition ◽  
Titanium Dioxide Thin Films ◽  
Nitrogen Doped Titanium Dioxide

This paper presents the results of the studies of the structure and chemical composition of nitrogen-doped titanium dioxide thin films obtained by reactive magnetron sputtering deposition. The XRD data show the changes of the structure and phase composition of titanium dioxide thin films due to the nitrogen doping. The change of the films structure increases with the growth of the nitrogen content. The reduction of crystallites size takes place at the increase of the nitrogen concentration. Chemical bonds present in the films were examined by FTIR spectroscopy.

Chemical Vapour Deposition of Nitrogen-Doped Titanium Dioxide Thin Films

2011 ◽  
Vol 11 (9) ◽  
pp. 8274-8278 ◽  
Author(s):  
S. E. Alexandrov ◽  
M. V. Baryshnikova ◽  
L. A. Filatov ◽  
A. L. Shahmin ◽  
V. D. Andreeva
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Nitrogen Doped ◽  
Doped Titanium Dioxide ◽  
Titanium Dioxide Thin Films ◽  
Nitrogen Doped Titanium Dioxide

Photoelectrochemical study of sputtered nitrogen-doped titanium dioxide thin films in aqueous electrolyte

2004 ◽  
Vol 84 (1-4) ◽  
pp. 145-157 ◽  
Author(s):  
Torbjörn Lindgren ◽  
Jun Lu ◽  
Anders Hoel ◽  
Claes-Göran Granqvist ◽  
Gemma Romualdo Torres ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Aqueous Electrolyte ◽  
Nitrogen Doped ◽  
Doped Titanium Dioxide ◽  
Titanium Dioxide Thin Films ◽  
Nitrogen Doped Titanium Dioxide
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