scholarly journals Optical and Morphological Characteristics of Nanostructured Titanium Dioxide Thin Films Prepared by DC Reactive Magnetron Sputtering Technique

2018 ◽  
Vol 454 ◽  
pp. 012032
Author(s):  
Jafer Fahdel Odah ◽  
Mazin Mohammed Mawat ◽  
Ahmed Namah Mohamed ◽  
Akeel Shaker Tuhaiwer ◽  
Ashwaq Eyad Alaakol
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Magnetron Sputtering ◽  
Morphological Characteristics ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Nanostructured Titanium ◽  
Dc Reactive Magnetron Sputtering ◽  
Titanium Dioxide Thin Films

Structural Changes of Titanium Dioxide Thin Films Deposited by Reactive Magnetron Sputtering through Nitrogen Incorporation

2016 ◽  
Vol 683 ◽  
pp. 383-388 ◽  
Author(s):  
Alla Pustovalova ◽  
Nina Ivanova
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Magnetron Sputtering ◽  
Structural Changes ◽  
Nitrogen Concentration ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Sputtering Deposition ◽  
Titanium Dioxide Thin Films ◽  
Nitrogen Doped Titanium Dioxide

This paper presents the results of the studies of the structure and chemical composition of nitrogen-doped titanium dioxide thin films obtained by reactive magnetron sputtering deposition. The XRD data show the changes of the structure and phase composition of titanium dioxide thin films due to the nitrogen doping. The change of the films structure increases with the growth of the nitrogen content. The reduction of crystallites size takes place at the increase of the nitrogen concentration. Chemical bonds present in the films were examined by FTIR spectroscopy.

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition
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