Growth of epitaxial strontium titanate films on germanium substrates using pulsed laser deposition

AbstractBarium strontium titanate (BST) thin films were grown directly on Si substrates by an in situ ultraviolet (UV)-assisted pulsed laser deposition (UVPLD) technique. With respect to films grown by conventional (i.e. without UV illumination) pulsed laser deposition (PLD), the UVPLD grown films exhibited improved structural and electrical properties. The dielectric constant of a 40-nm thick film deposited at 650 °C was determined to be 281, the leakage current density was approximately 4×10−8 A/cm2at 100 kV/cm, and the density of interface states at the flat-band voltage was found to be approximately 5.6×1011 eV−1 cm−2 X-ray photoelectron spectroscopy investigations found that the surface of the grown films exhibited an additional Ba-containing phase, besides the usual BST perovskite phase, which was likely caused by stress and/or oxygen vacancies. The amount of this new phase was always smaller and very superficial for UVPLD grown films, which can explain their better overall properties.

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Optical Properties of Nitrogen-Substituted Strontium Titanate Thin Films Prepared by Pulsed Laser Deposition

Materials ◽

10.3390/ma2031388 ◽

2009 ◽

Vol 2 (3) ◽

pp. 1388-1401 ◽

Cited By ~ 15

Author(s):

Ivan Marozau ◽

Andrey Shkabko ◽

Max Döbeli ◽

Thomas Lippert ◽

Dimitri Logvinovich ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Pulsed Laser Deposition ◽

Strontium Titanate ◽

Pulsed Laser ◽

Laser Deposition

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Microstructure of homoepitaxial strontium titanate films grown by pulsed laser deposition

Thin Solid Films ◽

10.1016/j.tsf.2006.06.034 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1788-1795 ◽

Cited By ~ 11

Author(s):

Y.Y. Tse ◽

Y. Koutsonas ◽

T.J. Jackson ◽

G. Passerieux ◽

I.P. Jones

Keyword(s):

Pulsed Laser Deposition ◽

Strontium Titanate ◽

Pulsed Laser ◽

Laser Deposition

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Improved properties of barium strontium titanate thin films grown on copper foils by pulsed laser deposition using a self-buffered layer

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/45/17/175304 ◽

2012 ◽

Vol 45 (17) ◽

pp. 175304 ◽

Cited By ~ 9

Author(s):

Shanshan Liu ◽

Beihai Ma ◽

Manoj Narayanan ◽

Sheng Chao ◽

Rachel Koritala ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Pulsed Laser ◽

Laser Deposition ◽

Copper Foils ◽

Barium Strontium

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Effect of Laser Energy and Laser Pulses on the Microstructure, Composition and Properties of Barium Strontium Titanate Thin Films Synthesized by Pulsed Laser Deposition

MRS Proceedings ◽

10.1557/proc-656-dd6.10 ◽

2000 ◽

Vol 656 ◽

Author(s):

Costas G. Fountzoulas ◽

J. D. Demaree ◽

Steven H. Mcknight

Keyword(s):

Thin Films ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Pulsed Laser Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Pulsed Laser ◽

Laser Deposition ◽

Zone Model ◽

Barium Strontium

ABSTRACTBarium strontium titanate (BSTO) films were synthesized by the pulsed laser deposition technique (PLD) on silicon substrates at room temperature. The thin films were synthesized at ambient temperature and 30 mT oxygen partial pressure, with 300, 400 and 500 mJ/cm2 laser fluence at 5, 10 and 20 pulses per second on silicon wafer substrates. All films were subsequently post-annealed at 750°C in a continuous oxygen stream. The microstructure, crystallinity and lattice constant of the BSTO films were studied with the aid of atomic force microscopy (FEM) and Glancing Angle X-ray Diffraction analysis (GAXRD). The hardness and modulus of elasticity of the films were studied with the aid of a nanohardness indenter. The film stoichiometry was determined with the aid of Rutherford Backscattering Spectrometry (RBS). The results of this research will be combined with the results of our previous work [1, 2] on the effect of substrate temperature and oxygen partial pressure on the microstructure and properties of the BSTO films in order to construct a structural zone model (SZM) of the BSTO films synthesized by PLD.

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Morphological and chemical structure of silver-doped barium strontium titanate thin films fabricated via pulsed laser deposition

Materials Research Express ◽

10.1088/2053-1591/aa7c6d ◽

2017 ◽

Vol 4 (7) ◽

pp. 076406 ◽

Cited By ~ 1

Author(s):

I Neelakanta Reddy ◽

Ch Venkata Reddy ◽

Mi-Gyung Cho ◽

Jaesool Shim

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Chemical Structure ◽

Pulsed Laser ◽

Laser Deposition ◽

Barium Strontium

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Effect of Laser Energy and Laser Pulses on the Microstructure, Composition and Properties of Barium Strontium Titanate Thin Films Synthesized by Pulsed Laser Deposition

MRS Proceedings ◽

10.1557/proc-655-cc14.10.1 ◽

2000 ◽

Vol 655 ◽

Author(s):

Costas G. Fountzoulas ◽

J. D. Demaree ◽

Steven H. McKnight

Keyword(s):

Thin Films ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Pulsed Laser Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Pulsed Laser ◽

Laser Deposition ◽

Zone Model ◽

Barium Strontium

AbstractBarium strontium titanate (BSTO) films were synthesized by the pulsed laser deposition technique (PLD) on silicon substrates at room temperature. The thin films were synthesized at ambient temperature and 30 mT oxygen partial pressure, with 300, 400 and 500 mJ/cm2 laser fluence at 5, 10 and 20 pulses per second on silicon wafer substrates. All films were subsequently post-annealed at 750°C in an continuous oxygen stream. The microstructure, crystallinity and lattice constant of the BSTO films were studied with the aid of atomic force microscopy (FEM) and Glancing Angle X-ray Diffraction analysis (GAXRD). The hardness and modulus of elasticity of the films were studied with the aid of a nanohardness indenter. The film stoichiometry was determined with the aid of Rutherford Backscattering Spectrometry (RBS). The results of this research will be combined with the results of our previous work [1, 2] on the effect of substrate temperature and oxygen partial pressure on the microstructure and properties of the BSTO films in order to construct a structural zone model (SZM) of the BSTO films synthesized by PLD.

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