Preparation and Electrochemical Properties of Boron-doped Polycrystalline Diamond Film with Five-fold Twin Structure

2021 ◽  
pp. 150977
Author(s):  
Kehao Zhang ◽  
Hailong Wang ◽  
Yanjun Zhao ◽  
Yaohui Xi ◽  
Bin Liu ◽  
...  
2021 ◽  
Vol 1031 ◽  
pp. 178-183
Author(s):  
Elena Vysotina ◽  
Razhudin Rizakhanov ◽  
Sergey Sigalaev ◽  
Nikolay Polushin ◽  
Vadim Shokorov ◽  
...  

The need to create highly accurate pressure sensors that capable operate under extreme conditions in aviation, rocket and space equipment increases and becomes more relevant. The unique properties of diamond make it a promising material for microelectronic sensors. Sensitive elements of pressure sensors were developed where a resilient element is formed from silicon but resistance strain gauges are formed from a boron-doped polycrystalline diamond film.


2000 ◽  
Vol 77 (8) ◽  
pp. 1221-1223 ◽  
Author(s):  
I. Andrienko ◽  
A. Cimmino ◽  
D. Hoxley ◽  
S. Prawer ◽  
R. Kalish

1995 ◽  
Vol 352 (3-4) ◽  
pp. 389-392 ◽  
Author(s):  
Jian Zhong Zhu ◽  
Shen Zhong Yang ◽  
Pei Ling Zhu ◽  
Xi Kang Zhang ◽  
Guo Xiong Zhang ◽  
...  

2007 ◽  
Vol 11 (10) ◽  
pp. 1449-1457 ◽  
Author(s):  
Reinaldo F. Teófilo ◽  
Helder J. Ceragioli ◽  
Alfredo C. Peterlevitz ◽  
Leonardo M. Da Silva ◽  
Flavio S. Damos ◽  
...  

2004 ◽  
Vol 13 (11-12) ◽  
pp. 2024-2030 ◽  
Author(s):  
R. Ikeda ◽  
M. Hayashi ◽  
A. Yonezu ◽  
T. Ogawa ◽  
M. Takemoto

1994 ◽  
Vol 354 ◽  
Author(s):  
A. F. Myers ◽  
J. Liu ◽  
W. B. Choi ◽  
G. J. Wojak ◽  
J. J. Hren

AbstractDiamond is an attractive material for coating microfabricated metal and semiconductor field emitters, since it enhances the stability and emission characteristics of the emitter. In the present study, polycrystalline diamond thin films were grown on silicon and molybdenum field emitters by microwave plasma chemical vapor deposition, using the bias-enhanced nucleation technique. High resolution transmission electron microscopy (TEM) was used to analyze the morphology of the diamond film and the structure of the diamond/emitter interface. Electron diffraction patterns and high resolution images indicate the presence of a polycrystalline diamond film, as well as a polycrystalline SiC layer between the diamond film and the Si emitter. A carbide interlayer was also found to exist between the diamond and the Mo emitter surface. Parallel electron energy loss spectroscopy confirms the TEM identification of a polycrystalline diamond film.


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