A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments

2021 ◽  
Vol 570 ◽  
pp. 151013
Author(s):  
Reza Namakian ◽  
Brian R. Novak ◽  
Xiaoman Zhang ◽  
Wen Jin Meng ◽  
Dorel Moldovan
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Thin Film Growth ◽  
Growth Mechanisms ◽  
Cu Thin Film ◽  
Comparison With Experiments

Kinetic Monte Carlo simulation of Cu thin film growth

Vacuum ◽  
2004 ◽  
Vol 72 (4) ◽  
pp. 405-410 ◽  
Author(s):  
Peifeng Zhang ◽  
Xiaoping Zheng ◽  
Suoping Wu ◽  
Jun Liu ◽  
Deyan He
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Thin Film Growth ◽  
Kinetic Monte Carlo Simulation ◽  
Cu Thin Film

Kinetic Lattice Monte Carlo Simulation of Cu Thin Film Growth

2010 ◽  
Vol 39 (1) ◽  
pp. 62-66
Author(s):  
吴子若 WU Zi-ruo ◽  
程鑫彬 CHENG Xin-bin ◽  
王占山 WANG Zhan-shan
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Thin Film Growth ◽  
Lattice Monte Carlo ◽  
Kinetic Lattice Monte Carlo ◽  
Cu Thin Film ◽  
Kinetic Lattice

scholarly journals Surface Structure and Void Formation in Thin Film Growth: A Monte Carlo Simulation

2000 ◽  
Vol 138 ◽  
pp. 126-127
Author(s):  
Yutaka Kaneko ◽  
Yasuaki Hiwatari ◽  
Katsuhiko Ohara ◽  
Tohru Murakami
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Surface Structure ◽  
Film Growth ◽  
Void Formation ◽  
Thin Film Growth

Parallel Monte Carlo simulation of multilattice thin film growth

2001 ◽  
Author(s):  
J. W. Shu ◽  
Qin Lu ◽  
Wai-on Wong ◽  
Han-chen Huang
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Thin Film Growth

Monte Carlo Simulation of Thin Film Growth with Lattice Defects

2000 ◽  
Vol 69 (11) ◽  
pp. 3607-3613 ◽  
Author(s):  
Yutaka Kaneko ◽  
Yasuaki Hiwatari ◽  
Katsuhiko Ohara ◽  
Tohru Murakami
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Lattice Defects ◽  
Thin Film Growth

Monte Carlo Simulation of Thin Film Growth with Defect Formation. Application to Via Filling.

2002 ◽  
Vol 53 (4) ◽  
pp. 250-255 ◽  
Author(s):  
Yutaka KANEKO ◽  
Yasuaki HIWATARI ◽  
Katsuhiko OHARA ◽  
Toru MURAKAMI
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Defect Formation ◽  
Film Growth ◽  
Thin Film Growth

scholarly journals Monte Carlo Simulation of Thin Film Growth. Surface Structure and Lattice Defects.

2000 ◽  
Vol 51 (1) ◽  
pp. 81-86
Author(s):  
Yutaka KANEKO ◽  
Yasuaki HIWATARI ◽  
Katsuhiko OHARA ◽  
Tohru MURAKAMI
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Surface Structure ◽  
Film Growth ◽  
Lattice Defects ◽  
Thin Film Growth ◽  
Growth Surface

Molecular dynamics—Monte Carlo hybrid simulation of thin film growth and void formation in electrodeposition process

2007 ◽  
Vol 33 (1-2) ◽  
pp. 133-138 ◽  
Author(s):  
Yasuaki Hiwatari ◽  
Yutaka Kaneko ◽  
Takashi Mikami ◽  
Katsuhiko Ohara ◽  
Fujio Asa
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
Monte Carlo ◽  
Film Growth ◽  
Void Formation ◽  
Hybrid Simulation ◽  
Thin Film Growth ◽  
Electrodeposition Process
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