Kinetic Monte Carlo simulation of Cu thin film growth

Vacuum ◽

10.1016/j.vacuum.2003.08.013 ◽

2004 ◽

Vol 72 (4) ◽

pp. 405-410 ◽

Author(s):

Peifeng Zhang ◽

Xiaoping Zheng ◽

Suoping Wu ◽

Jun Liu ◽

Deyan He

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Thin Film Growth ◽

Kinetic Monte Carlo Simulation ◽

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Kinetic Monte Carlo simulation of surfactant-mediated Cu thin-film growth

Computational Materials Science ◽

10.1016/j.commatsci.2010.05.054 ◽

2010 ◽

Vol 50 (1) ◽

pp. 6-9 ◽

Author(s):

Xiaoping Zheng ◽

Peifeng Zhang

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Thin Film Growth ◽

Kinetic Monte Carlo Simulation ◽

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Dependence of thin film growth on substrate temperature Kinetic Monte Carlo simulation of thin film growth

2007 International Nano-Optoelectronics Workshop ◽

10.1109/inow.2007.4303006 ◽

2007 ◽

Author(s):

Xiao-Ping Zheng ◽

Pei-Feng Zhang ◽

Duo-Wang Fan

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Substrate Temperature ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Thin Film Growth ◽

Kinetic Monte Carlo Simulation

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Kinetic Monte Carlo Simulation of Epitaxial Thin Film Growth: Formation of Submonolayer Islands and Multilayer Mounds

10.1063/1.2751916 ◽

2007 ◽

Author(s):

J. W. Evans ◽

P. A. Thiel ◽

Maozhi Li

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Thin Film Growth ◽

Epitaxial Thin Film ◽

Kinetic Monte Carlo Simulation ◽

Epitaxial Thin Film Growth ◽

Growth Formation

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Study on the early stage of thin film growth in pulsed beam deposition by kinetic Monte Carlo simulation

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00220-7 ◽

2002 ◽

Vol 158-159 ◽

pp. 247-252 ◽

Author(s):

Q.Y Zhang ◽

P.K Chu

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Film Growth ◽

Early Stage ◽

Kinetic Monte Carlo ◽

Thin Film Growth ◽

Kinetic Monte Carlo Simulation ◽

Beam Deposition

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A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments

Applied Surface Science ◽

10.1016/j.apsusc.2021.151013 ◽

2021 ◽

Vol 570 ◽

pp. 151013

Author(s):

Reza Namakian ◽

Brian R. Novak ◽

Xiaoman Zhang ◽

Wen Jin Meng ◽

Dorel Moldovan

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Film Growth ◽

Thin Film Growth ◽

Growth Mechanisms ◽

Cu Thin Film ◽

Comparison With Experiments

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Kinetic Lattice Monte Carlo Simulation of Cu Thin Film Growth

ACTA PHOTONICA SINICA ◽

10.3788/gzxb20103901.0062 ◽

2010 ◽

Vol 39 (1) ◽

pp. 62-66

Author(s):

吴子若 WU Zi-ruo ◽

程鑫彬 CHENG Xin-bin ◽

王占山 WANG Zhan-shan

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Film Growth ◽

Thin Film Growth ◽

Lattice Monte Carlo ◽

Kinetic Lattice Monte Carlo ◽

Cu Thin Film ◽

Kinetic Lattice

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Integrated description for random adsorption and 2D-island growth kinetics in thin film growth: Autocatalytic-reaction model and kinetic Monte Carlo simulation

Applied Surface Science ◽

10.1016/j.apsusc.2005.08.010 ◽

2006 ◽

Vol 252 (16) ◽

pp. 5900-5906 ◽

Author(s):

Hideaki Togashi ◽

Yoshiharu Enta ◽

Maki Suemitsu

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Growth Kinetics ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Reaction Model ◽

Thin Film Growth ◽

Autocatalytic Reaction ◽

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A kinetic Monte Carlo simulation of film growth by physical vapor deposition on rotating substrates

Materials Science and Engineering A ◽

10.1016/j.msea.2004.09.015 ◽

2005 ◽

Vol 391 (1-2) ◽

pp. 390-401 ◽

Author(s):

J. Cho ◽

S.G. Terry ◽

R. LeSar ◽

C.G. Levi

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Kinetic Monte Carlo Simulation

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Hybrid asynchronous algorithm for parallel kinetic Monte Carlo simulations of thin film growth

Journal of Computational Physics ◽

10.1016/j.jcp.2005.07.005 ◽

2006 ◽

Vol 212 (1) ◽

pp. 305-317 ◽

Author(s):

Yunsic Shim ◽

Jacques G. Amar

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Film Growth ◽

Kinetic Monte Carlo ◽

Thin Film Growth ◽

Asynchronous Algorithm ◽

Kinetic Monte Carlo Simulations

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Kinetic Monte Carlo Simulation of Deposition of Co Thin Film on Cu(001)

Plasma Science and Technology ◽

10.1088/1009-0630/9/5/07 ◽

2007 ◽

Vol 9 (5) ◽

pp. 550-555 ◽

Author(s):

Liu Zuli ◽

Shi Yanli ◽

Jing Xingbin ◽

Yu Li ◽

Yao Kailun

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Kinetic Monte Carlo ◽

Kinetic Monte Carlo Simulation

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