Efficient and slurryless ultrasonic vibration assisted electrochemical mechanical polishing for 4H–SiC wafers

2021 ◽  
Author(s):  
Xiaozhe Yang ◽  
Xu Yang ◽  
Haiyang Gu ◽  
Kentaro Kawai ◽  
Kenta Arima ◽  
...  
Keyword(s):  
Ultrasonic Vibration ◽  
Mechanical Polishing ◽  
Electrochemical Mechanical Polishing

Experimental Research of Electrochemical Mechanical Polishing (ECMP) for Micro Tool Electrode

2011 ◽  
Vol 314-316 ◽  
pp. 1846-1850 ◽  
Author(s):  
Shuai Guo ◽  
Z.N Guo ◽  
Hong Ping Luo ◽  
Wen Cai Gu
Keyword(s):  
Experimental Research ◽  
Process Parameters ◽  
Mechanical Polishing ◽  
Working Fluid ◽  
Tool Electrode ◽  
Electrical Parameters ◽  
Electrochemical Mechanical Polishing ◽  
Major Process ◽  
Micro Tool ◽  
Quantitative Analyses

The mechanism of the elctrochemical mechanical polishing (ECMP) technology for micro tool electrode was investigated. In this paper, suitable major process parameters on the surface quality were evaluated, the major parameters contains electrical parameters, machining gap, the working fluid and other factors. In quantitative analyses, the process of the ECMP technology were conducted. The roughness of the workpiece was reduced from a relatively high value to a mirror effect.

Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate

2016 ◽  
Vol 24 (2) ◽  
pp. 343-349 ◽  
Author(s):  
张克华 ZHANG Ke-hua ◽  
石 栋 SHI Dong ◽  
刘润之 LIU Run-zhi ◽  
肖志兰 XIAO Zhi-lan ◽  
程光明 CHENG Guang-ming
Keyword(s):  
Thin Film ◽  
Stainless Steel ◽  
Solar Cell ◽  
Thin Film Solar Cell ◽  
Stainless Steel Substrate ◽  
Steel Substrate ◽  
Mechanical Polishing ◽  
Electrochemical Mechanical Polishing

Investigation of anodic oxidation mechanism of 4H-SiC (0001) for electrochemical mechanical polishing

2018 ◽  
Vol 271 ◽  
pp. 666-676 ◽  
Author(s):  
Xu Yang ◽  
Rongyan Sun ◽  
Yuji Ohkubo ◽  
Kentaro Kawai ◽  
Kenta Arima ◽  
...  
Keyword(s):  
Anodic Oxidation ◽  
Oxidation Mechanism ◽  
Mechanical Polishing ◽  
Electrochemical Mechanical Polishing
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