Basic experimental investigation of pulsed electrochemical mechanical polishing process

2009 ◽  
Vol 25 (7) ◽  
pp. 535-540 ◽  
Author(s):  
J. J. Yi ◽  
C. M. Chen ◽  
X. Q. Tian ◽  
B. Y. Ji
Keyword(s):  
Experimental Investigation ◽  
Mechanical Polishing ◽  
Polishing Process ◽  
Electrochemical Mechanical Polishing

Study on electrochemical mechanical polishing process of copper circuit on PCB

2010 ◽  
Vol 27 (1) ◽  
pp. 310-314 ◽  
Author(s):  
Nadiia Kulyk ◽  
Chang Yong An ◽  
Jung Hoon Oh ◽  
Sung Min Cho ◽  
Changsup Ryu ◽  
...  
Keyword(s):  
Mechanical Polishing ◽  
Polishing Process ◽  
Electrochemical Mechanical Polishing

Investigation on the Machining of Thick Diamond Films by EDM Together with Mechanical Polishing

2007 ◽  
Vol 24-25 ◽  
pp. 377-382
Author(s):  
Rong Fa Chen ◽  
Dun Wen Zuo ◽  
Yu Li Sun ◽  
Wen Zhuang Lu ◽  
D.S. Li ◽  
...  
Keyword(s):  
Diamond Films ◽  
Polycrystalline Diamond ◽  
Mechanical Polishing ◽  
Polishing Process ◽  
Two Stage ◽  
Efficient Manner ◽  
Raman Scattering Spectroscopy ◽  
Electro Discharge Machining ◽  
Diamond Polishing ◽  
Cost Efficient

Although research on various diamond polishing techniques has been carried for years, some issues still need to be examined in order to facilitate application on large areas in a cost-efficient manner. A compositive technique for machining efficiently thick diamond films prepared by DC plasma arc jet is reported in the present paper. A two-stage polishing was applied on thick polycrystalline diamond films, by employing first electro-discharge machining (EDM) for rough polishing and subsequently mechanical polishing for finishing operations. Experimental results obtained clearly indicate the applicability of the proposed two-stage technique for fabricating transparent diamond films that can be used for the production of X-ray windows. Appropriate etching with EDM is an effective pretreatment method for enhancing the efficiency of rough polishing process in mechanical polishing of thick diamond film. The machined surfaces of diamond films are studied by Scanning Electron Microscope (SEM) and Raman Scattering Spectroscopy (Raman).

Experimental Research of Electrochemical Mechanical Polishing (ECMP) for Micro Tool Electrode

2011 ◽  
Vol 314-316 ◽  
pp. 1846-1850 ◽  
Author(s):  
Shuai Guo ◽  
Z.N Guo ◽  
Hong Ping Luo ◽  
Wen Cai Gu
Keyword(s):  
Experimental Research ◽  
Process Parameters ◽  
Mechanical Polishing ◽  
Working Fluid ◽  
Tool Electrode ◽  
Electrical Parameters ◽  
Electrochemical Mechanical Polishing ◽  
Major Process ◽  
Micro Tool ◽  
Quantitative Analyses

The mechanism of the elctrochemical mechanical polishing (ECMP) technology for micro tool electrode was investigated. In this paper, suitable major process parameters on the surface quality were evaluated, the major parameters contains electrical parameters, machining gap, the working fluid and other factors. In quantitative analyses, the process of the ECMP technology were conducted. The roughness of the workpiece was reduced from a relatively high value to a mirror effect.

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