scholarly journals Supervised Functional Modeling Method for Long Durations of Batch Processes with Limited Batch Data

2021 ◽  
pp. 116991
Author(s):  
Jingxiang Liu ◽  
Guan-Yu Hou ◽  
Junghui Chen
2018 ◽  
Vol 65 ◽  
pp. 56-67 ◽  
Author(s):  
Zhonggai Zhao ◽  
Youqin Wang ◽  
Fei Liu

2012 ◽  
Vol 252 ◽  
pp. 422-425
Author(s):  
Jian Hai Song ◽  
Jun Gang Yang ◽  
Jie Zhang

Fault model and detection in etch process is one of the key point problem in Semiconductor Wafer Fabrication System. A well developed fault modeling and detecting method in this process contributes greatly to the yield and Overall Equipment Effectiveness. The etch process has its unique characteristics like abundant variables, huge collections of data and nonlinearity in most batch processes; hence it poses difficulties to traditional modeling methods. In order to demonstrate the detail characteristic of faults in etch process, an improved fault transfer table based fault modeling method is proposed in this paper. The main idea of this method is to illustrate the indications, faults and their relationships in logical equations. The experimental results of an industrial example show that it has advantages such as simple expression and high capacity of information, and therefore is especially useful for the fault detection and diagnosis of semiconductor manufacturing.


2003 ◽  
Vol 123 (10) ◽  
pp. 1884-1891
Author(s):  
Hironori Oka ◽  
Tetsuya Maruta ◽  
Yoshitomo Ikkai ◽  
Norihisa Komoda

IEEE Access ◽  
2018 ◽  
Vol 6 ◽  
pp. 1249-1260 ◽  
Author(s):  
A. Xiaofeng Ye ◽  
B. Peiliang Wang ◽  
C. Zeyu Yang

Processes ◽  
2020 ◽  
Vol 8 (2) ◽  
pp. 164 ◽  
Author(s):  
Feifan Shen ◽  
Jiaqi Zheng ◽  
Lingjian Ye ◽  
De Gu

To implement the quality-relevant monitoring scheme for batch processes with multiple output modes, this paper presents a novel methodology based on stochastic programming. Bringing together tools from stochastic programming and ensemble learning, the developed methodology focuses on the robust monitoring of process quality-relevant variables by taking the stochastic nature of batch process parameters explicitly into consideration. To handle the problem of missing data and lack of historical batch data, a bagging approach is introduced to generate individual quality-relevant sub-datasets, which are used to construct the corresponding monitoring sub-models. For each model, stochastic programming is used to construct an optimal quality trajectory, which is regarded as the reference for online quality monitoring. Then, for each sub-model, a corresponding control limit is obtained by computing historical residuals between the actual output and the optimal trajectory. For online monitoring, the current sample is examined by all sub-models, and whether the monitoring statistic exceeds the control limits is recorded for further analysis. The final step is ensemble learning via Bayesian fusion strategy, which is under the probabilistic framework. The implementation and effectiveness of the developed methodology are demonstrated through two case studies, including a numerical example, and a simulated fed-batch penicillin fermentation process.


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