Biological treatment of volatile organic compounds (VOCs)-containing wastewaters from wet scrubbers in semiconductor industry

Chemosphere ◽  
2021 ◽  
pp. 131137
Author(s):  
Hai-Hsuan Cheng ◽  
I-Chun Lu ◽  
Po-Wei Huang ◽  
Yi-Ju Wu ◽  
Liang-Ming Whang
Keyword(s):  
Volatile Organic Compounds ◽  
Organic Compounds ◽  
Biological Treatment ◽  
Semiconductor Industry ◽  
Volatile Organic ◽  
Wet Scrubbers

Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

1998 ◽  
Vol 34 (5) ◽  
pp. 953-966 ◽  
Author(s):  
H. Kohno ◽  
A.A. Berezin ◽  
Jen-Shih Chang ◽  
M. Tamura ◽  
T. Yamamoto ◽  
...  
Keyword(s):  
Volatile Organic Compounds ◽  
Organic Compounds ◽  
Capillary Tube ◽  
Semiconductor Industry ◽  
Volatile Organic
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