Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

2002 ◽  
Author(s):  
H. Kohno ◽  
M. Tamura ◽  
A. Shibuya ◽  
S. Honda ◽  
A.A. Berezin ◽  
...  
Keyword(s):  
Volatile Organic Compounds ◽  
Organic Compounds ◽  
Capillary Tube ◽  
Semiconductor Industry ◽  
Volatile Organic

Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

1998 ◽  
Vol 34 (5) ◽  
pp. 953-966 ◽  
Author(s):  
H. Kohno ◽  
A.A. Berezin ◽  
Jen-Shih Chang ◽  
M. Tamura ◽  
T. Yamamoto ◽  
...  
Keyword(s):  
Volatile Organic Compounds ◽  
Organic Compounds ◽  
Capillary Tube ◽  
Semiconductor Industry ◽  
Volatile Organic

Volatile organic compounds analyzed by direct insertion probe mass spectrometry

2011 ◽  
Vol 89 (12) ◽  
pp. 1539-1541 ◽  
Author(s):  
Jian Jun Li
Keyword(s):  
Mass Spectrometry ◽  
Volatile Organic Compounds ◽  
Aluminum Oxide ◽  
Organic Compounds ◽  
Capillary Tube ◽  
High Vacuum ◽  
Boiling Points ◽  
Volatile Organic ◽  
Evaporative Loss ◽  
Direct Insertion Probe

A modified approach for analyzing volatile organic compounds through standard direct insertion probe mass spectrometry is presented. With aluminum oxide or silica powder packed in a capillary tube, the sample’s evaporative loss in a high vacuum instrument chamber is significantly reduced and the retention time is increased accordingly. With this technique, organic compounds with lower boiling points (e.g., 2-butanol at 99 °C) can be readily detected and analyzed.

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