A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

2015 ◽  
Vol 85 ◽  
pp. 414-422 ◽  
Author(s):  
Ming Luo ◽  
Heng-Chao Yan ◽  
Bin Hu ◽  
Jun-Hong Zhou ◽  
Chee Khiang Pang
2018 ◽  
Vol 197 ◽  
pp. 57-72 ◽  
Author(s):  
Yingfeng Zhang ◽  
Shuaiyin Ma ◽  
Haidong Yang ◽  
Jingxiang Lv ◽  
Yang Liu

2020 ◽  
Vol 17 (4) ◽  
pp. 1925-1936 ◽  
Author(s):  
Shu-Kai S. Fan ◽  
Chia-Yu Hsu ◽  
Du-Ming Tsai ◽  
Fei He ◽  
Chun-Chung Cheng

2016 ◽  
Vol 12 (3) ◽  
pp. 924-932 ◽  
Author(s):  
Yu Wang ◽  
Yizhen Peng ◽  
Yanyang Zi ◽  
Xiaohang Jin ◽  
Kwok-Leung Tsui

Author(s):  
Zining Wang ◽  
Cong Wang ◽  
Masayoshi Tomizuka

Currently, the semiconductor manufacturing industries over the world are upgrading from processing 300mm wafers to processing 450mm wafers. In order to satisfy the requirements of producing and processing 450mm wafers, vibration control of wafer handling tools has to make new breakthroughs. This paper introduces an active wide-band vibration rejection method with a vibrotactile actuator and applies it to a wafer transfer robot. Compared to conventional methods based on motor control of the robot, active vibration cancellation with a separate actuator does not risk compromising the tracking accuracy of wafer transfer motions. A three-step controller synthesis scheme is developed by analyzing and combining the strengths of several control strategies. Experimental validation shows a vibration reduction of more than 40% in energy and 30% in amplitude.


2018 ◽  
Vol 7 (4) ◽  
pp. 33 ◽  
Author(s):  
Andrew Martin

Two-stage exams have gained traction in education as a means of creating collaborative active-learning experiences in the classroom in a manner that advances learning, positively increases student engagement, and reduces test anxiety. Published analyses have focused almost exclusively on the increase in student scores from the first individual stage to the second collaboration stage and have shown clear positive effects on gains in student scores. Missing from these analyses is a comprehensive evaluation of the effects of individual preparation, the characteristics of questions, and small group composition on the outcomes two-stage exams. I developed a simple quantitative framework that provides a flexible approach for estimating and evaluating the effects of individuals, questions, and groups on student performance. Additionally, the framework yields statistics appropriate for making inferences about productive collaboration, consensus-building, and counter-productive interaction that happens within small groups. Analyses of 12 exams across two courses and 2 years using the quantitative framework revealed considerable variation for all three of these effects within and among exams. Overall, the results highlight the value of quantitative estimation of two-stage exams for gaining perspective on the effects of individuals, questions, and groups on student performance, and facilitates data-driven revision of assessments, curricula, and teaching strategies towards achieving gains in students' collaborative skills.  


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