A deep learning-based approach to material removal rate prediction in polishing

Peng Wang; Robert X. Gao; Ruqiang Yan

doi:10.1016/j.cirp.2017.04.013

A deep learning-based approach to material removal rate prediction in polishing

CIRP Annals ◽

10.1016/j.cirp.2017.04.013 ◽

2017 ◽

Vol 66 (1) ◽

pp. 429-432 ◽

Cited By ~ 46

Author(s):

Peng Wang ◽

Robert X. Gao ◽

Ruqiang Yan

Keyword(s):

Deep Learning ◽

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Rate Prediction

Download Full-text

Material Removal Rate Prediction using the Classification-Regression Approach

2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC) ◽

10.1109/eptc50525.2020.9315140 ◽

2020 ◽

Author(s):

Kart-Leong Lim ◽

Rahul Dutta

Keyword(s):

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Rate Prediction ◽

Regression Approach

Download Full-text

Statistical Feature Extraction and Hybrid Feature Selection for Material Removal Rate Prediction in Chemical Mechanical Planarization Process

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) ◽

10.1109/edtm50988.2021.9421002 ◽

2021 ◽

Author(s):

Wenlan Jiang ◽

Chunpu Lv ◽

Bing Yang ◽

Fuquan Zhang ◽

Ying Gao ◽

...

Keyword(s):

Feature Extraction ◽

Feature Selection ◽

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Chemical Mechanical Planarization ◽

Statistical Feature ◽

Rate Prediction ◽

Planarization Process ◽

Selection For

Download Full-text

A Neural Network-Based Approach to Material Removal Rate Prediction for Copper Chemical Mechanical Planarization

ECS Journal of Solid State Science and Technology ◽

10.1149/2162-8777/abfc20 ◽

2021 ◽

Author(s):

Qinzhi Xu ◽

Lan Chen ◽

He Cao ◽

Jianyun Liu

Keyword(s):

Neural Network ◽

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Chemical Mechanical Planarization ◽

Rate Prediction

Download Full-text

A stack fusion model for material removal rate prediction in chemical-mechanical planarization process

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-018-2578-5 ◽

2018 ◽

Vol 99 (9-12) ◽

pp. 2407-2416 ◽

Cited By ~ 2

Author(s):

Shuai Zhao ◽

Yixiang Huang

Keyword(s):

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Chemical Mechanical Planarization ◽

Fusion Model ◽

Rate Prediction ◽

Planarization Process

Download Full-text

Material removal rate prediction for ultrasonic drilling of hard materials using an impact oscillator approach

Physics Letters A ◽

10.1016/s0375-9601(99)00416-8 ◽

1999 ◽

Vol 259 (2) ◽

pp. 91-96 ◽

Cited By ~ 54

Author(s):

M. Wiercigroch ◽

R.D. Neilson ◽

M.A. Player

Keyword(s):

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Impact Oscillator ◽

Hard Materials ◽

Rate Prediction ◽

Ultrasonic Drilling

Download Full-text

Reference-based Virtual Metrology method with uncertainty evaluation for Material Removal Rate prediction based on Gaussian Process Regression

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-021-07427-2 ◽

2021 ◽

Author(s):

Haoshu Cai ◽

Jianshe Feng ◽

Qibo Yang ◽

Fei Li ◽

Xiang Li ◽

...

Keyword(s):

Gaussian Process ◽

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Gaussian Process Regression ◽

Uncertainty Evaluation ◽

Rate Prediction ◽

Virtual Metrology

Download Full-text

Assessment of Physics-Based and Data-Driven Models for Material Removal Rate Prediction in Chemical Mechanical Polishing

Proceedings of the 2018 2nd International Conference on Electrical Engineering and Automation (ICEEA 2018) ◽

10.2991/iceea-18.2018.26 ◽

2018 ◽

Author(s):

Xuan Li ◽

Cheng Wang ◽

Li Zhang ◽

Xinnong Mo ◽

Dewen Zhao ◽

...

Keyword(s):

Material Removal Rate ◽

Chemical Mechanical Polishing ◽

Material Removal ◽

Removal Rate ◽

Mechanical Polishing ◽

Data Driven ◽

Rate Prediction

Download Full-text

An automated procedure for material removal rate prediction in laser surface micromanufacturing

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-009-2097-5 ◽

2009 ◽

Vol 46 (1-4) ◽

pp. 163-171 ◽

Cited By ~ 8

Author(s):

Leonardo Orazi ◽

Gabriele Cuccolini ◽

Alessandro Fortunato ◽

Giovanni Tani

Keyword(s):

Material Removal Rate ◽

Material Removal ◽

Removal Rate ◽

Laser Surface ◽

Rate Prediction

Download Full-text

Material Removal Rate Prediction of EDDG of PCBN Cutting Tool Inserts Based on Experimental Design and Artificial Neural Networks

Advances in Intelligent Systems and Computing - Applications of Artificial Intelligence Techniques in Engineering ◽

10.1007/978-981-13-1819-1_45 ◽

2018 ◽

pp. 481-489

Author(s):

Rohit Shandley ◽

Siddharth Choudhary ◽

S. K. Jha

Keyword(s):

Neural Networks ◽

Artificial Neural Networks ◽

Experimental Design ◽

Material Removal Rate ◽

Material Removal ◽

Cutting Tool ◽

Removal Rate ◽

Rate Prediction ◽

Artificial Neural

Download Full-text

An efficient material removal rate prediction model for cemented carbide inserts chemical mechanical polishing

Wear ◽

10.1016/j.wear.2020.203293 ◽

2020 ◽

Vol 452-453 ◽

pp. 203293

Author(s):

Changjiang Qin ◽

Zihua Hu ◽

Aimin Tang ◽

Zhiping Yang ◽

Sheng Luo

Keyword(s):

Prediction Model ◽

Material Removal Rate ◽

Chemical Mechanical Polishing ◽

Material Removal ◽

Removal Rate ◽

Mechanical Polishing ◽

Cemented Carbide ◽

Rate Prediction ◽

Carbide Inserts ◽

Cemented Carbide Inserts

Download Full-text