Influences of bias voltage on properties of TiAl-doped DLC coatings synthesized by cathodic arc evaporation

2005 ◽  
Vol 14 (11-12) ◽  
pp. 2127-2132 ◽  
Author(s):  
Chi-Lung Chang ◽  
Jui-Yun Jao ◽  
Tang-Chun Chang ◽  
Wei-Yu Ho ◽  
Da-Yung Wang
Keyword(s):  
Bias Voltage ◽  
Dlc Coatings ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Structure, morphology and mechanical properties of AlCrN coatings obtained by the method of cathodic arc evaporation

2018 ◽  
Vol 23 (2) ◽  
pp. 61-69
Author(s):  
Adam Gilewicz ◽  
Roman Jędrzejewski ◽  
Piotr Myśliński ◽  
Bogdan Warcholiński
Keyword(s):  
Deposition Rate ◽  
Bias Voltage ◽  
Roughness Parameter ◽  
Nitrogen Pressure ◽  
Negative Bias ◽  
Negative Bias Voltage ◽  
Substrate Bias Voltage ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

CrAlN coatings have been formed on steel substrates (HS6-5-2) using cathodic arc evaporation. The influence of nitrogen pres-sure and substrate bias voltage on the properties of CrAlN coatings formed from Al80Cr20 cathode, such as: chemical and phase composition of the coatings, their surface morphology, deposition rate, hardness and adhesion to the substrate have been investigated. It has been determined that the rate of the deposition of coatings in the nitrogen atmosphere with the pressure of 3 Pa is the highest and that with the increase of the negative bias voltage of the substrate the deposition rate decreases. The roughness parameter Ra of the coating surface decreases as the nitrogen pressure increases during their formation. Presumably, this is related to the reduction of the amount of macroparticles on the surface of the coating. The hardness of the coatings (taking into account the measurement uncertainty) is independent of the nitrogen pressure, but it increases with the increase of the negative bias voltage of the substrate. The adhesion of the coating increases with the increase of the nitrogen pressure to 3–4 Pa, and then it decreases. The increase in the negative bias voltage of the substrate during the formation of the coating deteriorates its adhesion to the substrate.

Influence of Deposition Parameters on the Properties of Nanocomposite Coatings Prepared by Cathodic Arc Evaporation

2016 ◽  
Vol 368 ◽  
pp. 77-81
Author(s):  
Miroslav Béger ◽  
Jozef Sondor ◽  
Martin Sahul ◽  
Paulína Zacková ◽  
Marián Haršáni ◽  
...  
Keyword(s):  
Residual Stresses ◽  
Bias Voltage ◽  
Deposition Process ◽  
Gas Pressure ◽  
Nanocomposite Coatings ◽  
Evaporation Process ◽  
Deposition Parameters ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

The article deals with the influence of different deposition parameters on the selected properties of AlCrN/Si3N4 nanocomposite coatings. Bias voltage, cathodes currents and working gas pressure were changed during the deposition process. All coatings were deposited using Lateral Rotating Cathodes (LARC®) process that belongs to the group of cathodic arc evaporation PVD technologies. In comparison with the typical cathodic arc evaporation process which usually uses planar targets the LARC® process utilizes rotational cathodes that are positioned close to each other. Nanohardness, Young's modulus, thickness and residual stresses were determinated in order to evaluate the influence of deposition parameters on these coatings properties

scholarly journals Structure and Properties of AlCrN Coatings Deposited Using Cathodic Arc Evaporation

Coatings ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 793 ◽  
Author(s):  
Bogdan Warcholinski ◽  
Adam Gilewicz ◽  
Piotr Myslinski ◽  
Ewa Dobruchowska ◽  
Dawid Murzynski
Keyword(s):  
Bias Voltage ◽  
Roughness Parameter ◽  
Nitrogen Pressure ◽  
Preferential Orientation ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
X Ray ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Al–Cr–N coatings were formed at various nitrogen pressures, substrate bias voltages and substrate temperatures using cathodic arc evaporation. The relationship between technological parameters and properties of the coatings was investigated. The phase and chemical composition of the coatings, roughness, hardness, adhesion and thermal stability were analyzed by X-ray diffraction (XRD), scanning electron microscope (SEM), Energy-dispersive X-ray spectroscopy (EDX), micro-indenter, Rockwell, scratch tester and thermomechanical methods. The corrosion resistance of selected coatings was also investigated. XRD analysis indicates that the coatings crystallize in a cubic structure and show preferential orientation (200) CrN. With the increase of nitrogen pressure, the preferential orientation changes to (111). EDX analysis shows that as nitrogen pressure increases, the Al/(Al + Cr) rate decreases. Microscopic observations indicate that the number of macroparticles reduces as nitrogen pressure increases. As a result, the surface roughness parameter Ra of the coatings decreases. The effects of deposition temperature, nitrogen pressure and substrate bias voltage on the mechanical and tribological properties of the coatings were investigated. It was found that the above parameters influence the mechanical properties in different ways. The hardness and adhesion of coatings formed at higher temperatures was lower. Coatings formed under a higher nitrogen pressure or substrate bias voltage were characterized by higher hardness and better wear resistance.

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