Effect of bias voltage on microstructure, mechanical and wear properties of Al–Si–N coatings deposited by cathodic arc evaporation

2011 ◽  
Vol 519 (15) ◽  
pp. 4923-4927 ◽  
Author(s):  
Chi-Lung Chang ◽  
Chi-Song Huang
Keyword(s):  
Bias Voltage ◽  
Wear Properties ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Structure, morphology and mechanical properties of AlCrN coatings obtained by the method of cathodic arc evaporation

2018 ◽  
Vol 23 (2) ◽  
pp. 61-69
Author(s):  
Adam Gilewicz ◽  
Roman Jędrzejewski ◽  
Piotr Myśliński ◽  
Bogdan Warcholiński
Keyword(s):  
Deposition Rate ◽  
Bias Voltage ◽  
Roughness Parameter ◽  
Nitrogen Pressure ◽  
Negative Bias ◽  
Negative Bias Voltage ◽  
Substrate Bias Voltage ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

CrAlN coatings have been formed on steel substrates (HS6-5-2) using cathodic arc evaporation. The influence of nitrogen pres-sure and substrate bias voltage on the properties of CrAlN coatings formed from Al80Cr20 cathode, such as: chemical and phase composition of the coatings, their surface morphology, deposition rate, hardness and adhesion to the substrate have been investigated. It has been determined that the rate of the deposition of coatings in the nitrogen atmosphere with the pressure of 3 Pa is the highest and that with the increase of the negative bias voltage of the substrate the deposition rate decreases. The roughness parameter Ra of the coating surface decreases as the nitrogen pressure increases during their formation. Presumably, this is related to the reduction of the amount of macroparticles on the surface of the coating. The hardness of the coatings (taking into account the measurement uncertainty) is independent of the nitrogen pressure, but it increases with the increase of the negative bias voltage of the substrate. The adhesion of the coating increases with the increase of the nitrogen pressure to 3–4 Pa, and then it decreases. The increase in the negative bias voltage of the substrate during the formation of the coating deteriorates its adhesion to the substrate.

scholarly journals Comparison of corrosion, physico-mechanical and wear properties of TiN, ZrN, TixZr1-xN and Ti1-xAlxN coatings

2020 ◽  
Vol 329 ◽  
pp. 02029
Author(s):  
Anna Kameneva ◽  
Vadim Karmanov ◽  
Sergey Stepanov ◽  
Darya Kameneva
Keyword(s):  
Elastic Recovery ◽  
Multilayer Coating ◽  
Wear Intensity ◽  
Technological Parameters ◽  
Wear Properties ◽  
Corrosion Properties ◽  
Cathodic Arc Evaporation ◽  
Passive Current ◽  
Arc Evaporation ◽  
Cathodic Arc

In this paper, TiN, ZrN, TixZr1-xN, Ti1-xAlxN coatings were obtained by cathodic arc evaporation at optimal technological parameters. The corrosion properties of these coatings were investigated in 5% NaOH. The coating ZrN deposited by cathodic arc evaporation slows down the corrosion in the 5% NaOH by over 3,000 times, and the passive current – by 2,000 times. The TixZr1-xN coating has the best physico-mechanical properties: microhardness Н = 36 GPa, Young’s modulus Е = 312 GPa, elastic recovery We = 78 %, resistance to elastic failure strain H/E = 0.12, and resistance to plastic strain H3/E2 = 1.31 GPa. The Ti1-xAlxN coating has the best wear properties: friction coefficient 0.09, counterbody wear intensity by volume 0.43•10-8 mm3/Nm, coating wear intensity by volume 0.05•10-4 mm3/Nm and by mass•0.03•10-5 mg/Nm. Multilayer coating TiN-TixZr1-xN-Ti1-xAlxN-ZrN (ZrN-top layer) has a complex of high physico-mechanical and wear properties in 5% NaOH.

Influence of Deposition Parameters on the Properties of Nanocomposite Coatings Prepared by Cathodic Arc Evaporation

2016 ◽  
Vol 368 ◽  
pp. 77-81
Author(s):  
Miroslav Béger ◽  
Jozef Sondor ◽  
Martin Sahul ◽  
Paulína Zacková ◽  
Marián Haršáni ◽  
...  
Keyword(s):  
Residual Stresses ◽  
Bias Voltage ◽  
Deposition Process ◽  
Gas Pressure ◽  
Nanocomposite Coatings ◽  
Evaporation Process ◽  
Deposition Parameters ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

The article deals with the influence of different deposition parameters on the selected properties of AlCrN/Si3N4 nanocomposite coatings. Bias voltage, cathodes currents and working gas pressure were changed during the deposition process. All coatings were deposited using Lateral Rotating Cathodes (LARC®) process that belongs to the group of cathodic arc evaporation PVD technologies. In comparison with the typical cathodic arc evaporation process which usually uses planar targets the LARC® process utilizes rotational cathodes that are positioned close to each other. Nanohardness, Young's modulus, thickness and residual stresses were determinated in order to evaluate the influence of deposition parameters on these coatings properties

scholarly journals Structure and Properties of AlCrN Coatings Deposited Using Cathodic Arc Evaporation

Coatings ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 793 ◽  
Author(s):  
Bogdan Warcholinski ◽  
Adam Gilewicz ◽  
Piotr Myslinski ◽  
Ewa Dobruchowska ◽  
Dawid Murzynski
Keyword(s):  
Bias Voltage ◽  
Roughness Parameter ◽  
Nitrogen Pressure ◽  
Preferential Orientation ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
X Ray ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Al–Cr–N coatings were formed at various nitrogen pressures, substrate bias voltages and substrate temperatures using cathodic arc evaporation. The relationship between technological parameters and properties of the coatings was investigated. The phase and chemical composition of the coatings, roughness, hardness, adhesion and thermal stability were analyzed by X-ray diffraction (XRD), scanning electron microscope (SEM), Energy-dispersive X-ray spectroscopy (EDX), micro-indenter, Rockwell, scratch tester and thermomechanical methods. The corrosion resistance of selected coatings was also investigated. XRD analysis indicates that the coatings crystallize in a cubic structure and show preferential orientation (200) CrN. With the increase of nitrogen pressure, the preferential orientation changes to (111). EDX analysis shows that as nitrogen pressure increases, the Al/(Al + Cr) rate decreases. Microscopic observations indicate that the number of macroparticles reduces as nitrogen pressure increases. As a result, the surface roughness parameter Ra of the coatings decreases. The effects of deposition temperature, nitrogen pressure and substrate bias voltage on the mechanical and tribological properties of the coatings were investigated. It was found that the above parameters influence the mechanical properties in different ways. The hardness and adhesion of coatings formed at higher temperatures was lower. Coatings formed under a higher nitrogen pressure or substrate bias voltage were characterized by higher hardness and better wear resistance.

scholarly journals Quantitative correlations between wear behavior of Ti1-xAlxN coating, structural transformations of the substrate WC-Co and coating itself during cathodic arc evaporation

2020 ◽  
Vol 329 ◽  
pp. 02028
Author(s):  
Anna Kameneva ◽  
Natalia Kameneva ◽  
Vadim Karmanov
Keyword(s):  
Wear Behavior ◽  
Wear Test ◽  
Structural Transformations ◽  
Cutting Fluid ◽  
Wear Properties ◽  
Temperature Ranges ◽  
Cathodic Arc Evaporation ◽  
Cathode Arc ◽  
Arc Evaporation ◽  
Cathodic Arc

The temperature ranges of structural transformations in WC-Co and Ti1-xAlxNin the process of cathode-arc evaporation are analyzed. The limiting values of the WC-Co temperature before the deposition of the coating correspond to 773 ... 873 K, after which the hardness of WC-Co and, as a consequence, the hardness of the composition WC-Co / Ti1-xAlx deteriorates. Analysis of the coating structural transformations made it possible to establish the structuring stages of the Ti1-xAlx coating during its deposition. Wear test was carried out for Ti1-xAlx coatings formed at each structuring stage. Wear test were carried out according to the finger-disk scheme at 300 K in coolant-cutting fluid on a laboratory friction machine. The wear behavior of the Ti1-xAlx coating are unstable at 773 K, then improve at 773 ... 853 K, stabilize with an increase in temperature to 963 K. The nanostructured Ti1-xAlx coating formed in the temperature range T sub/T m = 0.18... 0.23have the best complex of wear properties in comparison with analogues.

Influences of bias voltage on properties of TiAl-doped DLC coatings synthesized by cathodic arc evaporation

2005 ◽  
Vol 14 (11-12) ◽  
pp. 2127-2132 ◽  
Author(s):  
Chi-Lung Chang ◽  
Jui-Yun Jao ◽  
Tang-Chun Chang ◽  
Wei-Yu Ho ◽  
Da-Yung Wang
Keyword(s):  
Bias Voltage ◽  
Dlc Coatings ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc
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