Influence of the microwave plasma CVD reactor parameters on substrate thermal management for growing large area diamond coatings inside a 915MHz and moderately low power unit

2012 ◽  
Vol 30 ◽  
pp. 53-61 ◽  
Author(s):  
Awadesh K. Mallik ◽  
Kalyan S. Pal ◽  
Nandadulal Dandapat ◽  
Bichitra K. Guha ◽  
Someswar Datta ◽  
...  
Keyword(s):  
Low Power ◽  
Thermal Management ◽  
Power Unit ◽  
Microwave Plasma ◽  
Diamond Coatings ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

Large Area Deposition of Polycrystalline Diamond Coatings by Microwave Plasma CVD

2013 ◽  
Vol 72 (4) ◽  
pp. 225-232 ◽  
Author(s):  
Awadesh K. Mallik ◽  
Sandip Bysakh ◽  
Kalyan S. Pal ◽  
Nandadulal Dandapat ◽  
Bichitra K. Guha ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Polycrystalline Diamond ◽  
Diamond Coatings ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Area Deposition

scholarly journals Large area microwave plasma CVD of diamond using composite right/left-handed materials

2021 ◽  
Vol 116 ◽  
pp. 108394
Author(s):  
Justas Zalieckas ◽  
Paulius Pobedinskas ◽  
Martin Møller Greve ◽  
Kristoffer Eikehaug ◽  
Ken Haenen ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Cvd ◽  
Large Area ◽  
Left Handed ◽  
Microwave Plasma Cvd

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

Plateholder design for deposition of uniform diamond coatings on WC-Co substrates by microwave plasma CVD for efficient turning application

2017 ◽  
Vol 75 ◽  
pp. 169-175 ◽  
Author(s):  
E.E. Ashkihazi ◽  
V.S. Sedov ◽  
D.N. Sovyk ◽  
A.A. Khomich ◽  
A.P. Bolshakov ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Coatings ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Deposition of large-area, high-quality cubic boron nitride films by ECR-enhanced microwave-plasma CVD

2003 ◽  
Vol 76 (6) ◽  
pp. 953-955 ◽  
Author(s):  
W.J. Zhang ◽  
C.Y. Chan ◽  
K.M. Chan ◽  
I. Bello ◽  
Y. Lifshitz ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Microwave Plasma ◽  
Cubic Boron Nitride ◽  
Plasma Cvd ◽  
Large Area ◽  
High Quality ◽  
Microwave Plasma Cvd ◽  
Boron Nitride Films

Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD

1997 ◽  
Vol 113-114 ◽  
pp. 244-248 ◽  
Author(s):  
Hyeongmin Jeon ◽  
Akimitsu Hatta ◽  
Hidetoshi Suzuki ◽  
Toshimichi Ito ◽  
Takatomo Sasaki ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Cvd ◽  
Large Area ◽  
Diamond Nucleation ◽  
Microwave Plasma Cvd

Microwave-plasma-CVD of diamond coatings onto titanium and titanium alloys

1998 ◽  
Vol 98 (1-3) ◽  
pp. 1079-1091 ◽  
Author(s):  
T. Grögler ◽  
E. Zeiler ◽  
A. Hörner ◽  
S.M. Rosiwal ◽  
R.F. Singer
Keyword(s):  
Titanium Alloys ◽  
Microwave Plasma ◽  
Diamond Coatings ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Large area deposition of 〈100〉-textured diamond films by a 60-kW microwave plasma CVD reactor

2002 ◽  
Vol 11 (3-6) ◽  
pp. 596-600 ◽  
Author(s):  
Yutaka Ando ◽  
Yoshihiro Yokota ◽  
Takeshi Tachibana ◽  
Akihiko Watanabe ◽  
Yoshiki Nishibayashi ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Area Deposition

scholarly journals Direct Synthesis of Large-Area Graphene on Insulating Substrates at Low Temperature using Microwave Plasma CVD

ACS Omega ◽  
2019 ◽  
Vol 4 (6) ◽  
pp. 11263-11270 ◽  
Author(s):  
Riteshkumar Vishwakarma ◽  
Rucheng Zhu ◽  
Amr Attia Abuelwafa ◽  
Yota Mabuchi ◽  
Sudip Adhikari ◽  
...  
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Direct Synthesis ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Insulating Substrates

Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window

2006 ◽  
Vol 15 (4-8) ◽  
pp. 913-916 ◽  
Author(s):  
Sudip Adhikari ◽  
Ashraf M.M. Omer ◽  
Sunil Adhikary ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Microwave Plasma ◽  
Wave Mode ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films
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