Annealing effects on the properties of hydrogenated diamond-like carbon films doped with silicon and nitrogen

2022 ◽  
pp. 108809
Author(s):  
Hideki Nakazawa ◽  
Kazuki Nakamura ◽  
Hiroya Osanai ◽  
Yuya Sasaki ◽  
Haruto Koriyama ◽  
...  
2016 ◽  
Vol 11 (1) ◽  
Author(s):  
Šarūnas Meškinis ◽  
Arvydas Čiegis ◽  
Andrius Vasiliauskas ◽  
Kęstutis Šlapikas ◽  
Rimantas Gudaitis ◽  
...  

2000 ◽  
Vol 638 ◽  
Author(s):  
Xidong Chen ◽  
J. Murray Gibson ◽  
John Sullivan ◽  
Tom Friedmann ◽  
Paul Voyles

AbstractWe applied fluctuation microscopy technique to study medium-range order in tetrahedral semiconductor materials, such as amorphous silicon, amorphous diamond-like carbon films. It is shown that this technique is very sensitive to local structure changes in the medium range order and promises solutions to open questions that cannot be answered by current techniques. For asdeposited amorphous germanium and silicon, we previously identified a fine-grain para-crystallite structure [1, 2], which will be relaxed into a lower-energy continuous random network structure after thermal annealing. With the same fluctuation microscopy technique, we however found that thermal annealing introduces medium-range order in amorphous diamond-like carbon films. Future studies will be focused on modeling and systematic exploration of annealing effects.


nano Online ◽  
2017 ◽  
Author(s):  
Šarūnas Meškinis ◽  
Arvydas Čiegis ◽  
Andrius Vasiliauskas ◽  
Kęstutis Šlapikas ◽  
Rimantas Gudaitis ◽  
...  

1996 ◽  
Vol 06 (C5) ◽  
pp. C5-91-C5-95 ◽  
Author(s):  
S. Lee ◽  
B. Chung ◽  
T.-Y. Ko ◽  
H. Cho ◽  
D. Jeon ◽  
...  

2014 ◽  
Vol 29 (9) ◽  
pp. 941
Author(s):  
JIANG Jin-Long ◽  
WANG Qiong ◽  
HUANG Hao ◽  
ZHANG Xia ◽  
WANG Yu-Bao ◽  
...  

2002 ◽  
Vol 719 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
Kyu Hwan Oh

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.


2002 ◽  
Author(s):  
Xiao Liu ◽  
D. M. Photiadis ◽  
J. A. Bucaro ◽  
J. F. Vignola ◽  
B. H. Houston ◽  
...  

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