An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

2002 ◽  
Vol 719 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
Kyu Hwan Oh
Keyword(s):  
Cross Sections ◽  
Focused Ion Beam ◽  
Imaging System ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Glass Substrates ◽  
Atomic Force ◽  
Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

Fundamental Criteria for the Propagation of Telephone Cord Buckles Beneath DLC Films on Glass Substrates

2001 ◽  
Vol 695 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
And Kyu Hwan Oh
Keyword(s):  
Focused Ion Beam ◽  
Imaging System ◽  
Ion Beam ◽  
Repeat Unit ◽  
Carbon Films ◽  
Local Mode ◽  
Force Microscopy ◽  
Glass Substrates ◽  
Atomic Force ◽  
Insight Into

ABSTRACTThe topology of telephone cord buckles that form beneath compressed diamond-like carbon films (DLC) on glass substrates has been characterized with Atomic Force Microscopy (AFM) and with the Focused Ion Beam (FIB). Using AFM with 2nm resolution, the wavelength and amplitude of the buckles and their profiles have been measured. It has been found that, within each wavelength, the profile has symmetric and asymmetric segments. These changes have been related to differences in local mode mixity around the periphery of each repeat unit along the buckle, resulting in a fundamental rationale for the factors governing the wavelength. Sections made through various segments of the buckle by using the FIB imaging system result in local changes in the shape and size of the buckles that provide further insight into the buckle propagation criterion.

Structural Changes in Diamond-Like Carbon Films Fabricated by Ga Focused-Ion-Beam-Assisted Deposition Caused by Annealing

2010 ◽  
Vol 49 (6) ◽  
pp. 06GH06 ◽  
Author(s):  
Kazuhiro Kanda ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Akira Wada ◽  
...  
Keyword(s):  
Structural Changes ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Ion Beam Assisted Deposition

Relationship between Precursor Gas Flow Rate with the Structural and Morphology Properties of Diamond like Carbon Films

2014 ◽  
Vol 970 ◽  
pp. 128-131
Author(s):  
Ong Wai Kit ◽  
Karim bin Deraman ◽  
Wan Nurulhuda Wan Shamsuri ◽  
Jackie Chen Keng Yik
Keyword(s):  
Flow Rate ◽  
Gas Flow ◽  
Chemical Vapour ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Gas Flow Rate ◽  
Force Microscopy ◽  
Glass Substrates ◽  
Atomic Force ◽  
Direct Current Plasma

Diamond like carbon (DLC) thin films were grown onto glass substrates by using direct current plasma enhance chemical vapour deposition (DC-PECVD) system. Films were deposited under fixed deposition pressure (4 x 10-1 Torr), substrate temperature (500°C) and deposition time (3 hours) but with different flow rate of precursor gas (methane, hydrogen and argon). The fabricated films were characterized by using x-ray diffraction (XRD) and atomic force microscopy (AFM). XRD has revealed that the DLC films were having amorphous phase as the XRD spectrum did not show any obvious sharp peak. From AFM, it was discovered that the precursor gas flow rate has inversely relationship with the grain size and surface roughness of films.

Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 (6S) ◽  
pp. 06FD07 ◽  
Author(s):  
Akihiro Fujimoto ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Shinji Matsui ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Thermal Durability

Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 ◽  
pp. 06FD07
Author(s):  
Akihiro Fujimoto ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Shinji Matsui ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Thermal Durability

Characterization of the Thin Diamond-Like Carbon Films Deposited Using Rf Inductively Coupled Ch4- Plasma Source

1996 ◽  
Vol 446 ◽  
Author(s):  
B. Druz ◽  
V.I. Polyakov ◽  
E. Ostan ◽  
A. Hayes ◽  
A.I. Rukovishnikov ◽  
...  
Keyword(s):  
Cross Sections ◽  
Electrical Breakdown ◽  
Ion Beam ◽  
Plasma Source ◽  
Carbon Films ◽  
Breakdown Field ◽  
Diamond Like Carbon ◽  
Silicon Substrates ◽  
Inductively Coupled ◽  
Photoelectrical Properties

AbstractDiamond-like carbon (DLC) films with 4-400 nm thickness were deposited on silicon substrates using direct ion beam from an RF inductively coupled CH4 - plasma (ICP) source. The dependence of the film electrical and photoelectrical properties on methane flow were examined. Two kinds of trapping centers with different activation energies and capture cross-sections, and very low densities were discovered by the Q-DLTS method. The influence of thermal annealing in air at 100-450°C was investigated. The current leakage and defect concentration were reduced while electrical breakdown field and photoresponse were increased in annealed films. The results obtained have been used for optimization of the technology to prepare thin films with good protective, electrically insulating, and passivating properties.

Contact damage of tetrahedral amorphous carbon thin films on silicon substrates

2009 ◽  
Vol 24 (11) ◽  
pp. 3286-3293 ◽  
Author(s):  
Oscar Borrero-López ◽  
Mark Hoffman ◽  
Avi Bendavid ◽  
Phil J. Martin
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Cross Sections ◽  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Carbon Films ◽  
Silicon Substrates ◽  
Tetrahedral Amorphous Carbon ◽  
Thick Coatings

We have investigated the fracture behavior of tetrahedral amorphous carbon films, with thicknesses 0.15 (ultrathin), 0.5 (thin), and 1.2 (thick) microns on silicon substrates. To that end, the systems were progressively loaded into a nanoindenter using a spherical tip, and surface and cross sections were subsequently examined using a focused ion beam miller at different loads. A transition was found as a function of film thickness: for ultrathin and thin films, cracking (radial and lateral) initiated in the silicon substrate and followed a similar path in the films. Thicker films, on the other hand, provided a higher level of protection to the substrate, and cracking (lateral and radial at the interface) was constrained to the film. The damage modes and the transition obtained differ from those that occur in thick coatings. Lateral cracks are highly dangerous, leading to delamination of thick films and to spallation when thinner films are used. The results have implications concerning the mechanical reliability of microelectromechanical systems.

The Role of Adsorption and Vapor Pressure in Focused Ion Beam Induced Deposition of Carbon Films

1989 ◽  
Vol 158 ◽  
Author(s):  
S.J. Kirch ◽  
D.E. Seeger
Keyword(s):  
Double Bond ◽  
Vapor Pressure ◽  
Focused Ion Beam ◽  
Physical Adsorption ◽  
Ion Beam ◽  
Carbon Films ◽  
Ethyl Benzene ◽  
Material Deposition ◽  
Deposition Yield

ABSTRACTFocused ion beam induced deposition of carbon from various organic molecules was studiedfor a range of temperatures and pressures. To study the effects of vapor pressure, deposition from styrene was compared to deposition from 2-chloro and 2-bromo styrene. To study the effects of the double bond on the vinyl substituent, deposition from ethyl benzeneand 2-bromo ethyl benzene was compared to deposition from the 2-X-styrene materials. Foreach material, deposition yield is found to scale with vapor pressure as a function of temperature over the range studied (0 - 25 C). This behavior shows that physical adsorption plays the key role in determining deposition properties. The importance of the doublebond observed in previous work is simply a manifestation of enhanced physical adsorptiondue to the presence of this double bond.

FIB Enhancement of Mechanically Polished Cross-sections

2019 ◽  
Author(s):  
Becky Holdford
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Cross Sections ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Resolution Imaging ◽  
Chemical Attack ◽  
Resolution Imaging ◽  
Scanning Electron

Abstract On mechanically polished cross-sections, getting a surface adequate for high-resolution imaging is sometimes beyond the analyst’s ability, due to material smearing, chipping, polishing media chemical attack, etc.. A method has been developed to enable the focused ion beam (FIB) to re-face the section block and achieve a surface that can be imaged at high resolution in the scanning electron microscope (SEM).

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