Synthesis and characterization of tungsten oxynitride films deposited by reactive magnetron sputtering

2014 ◽  
Vol 611 ◽  
pp. 249-252 ◽  
Author(s):  
S. Khamseh
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron

scholarly journals Synthesis and characterization of single-phase epitaxial Cr2N thin films by reactive magnetron sputtering

2018 ◽  
Vol 54 (2) ◽  
pp. 1434-1442 ◽  
Author(s):  
M. A. Gharavi ◽  
G. Greczynski ◽  
F. Eriksson ◽  
J. Lu ◽  
B. Balke ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Single Phase ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron

Synthesis and Characterization of Nanocrystalline Ti1−xAlxN by Reactive Magnetron Sputtering

2009 ◽  
Vol 9 (9) ◽  
pp. 5451-5454 ◽  
Author(s):  
Feby Jose ◽  
R. Ramaseshan ◽  
S. Dash ◽  
Arup Dasgupta ◽  
S. Saroja ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron

Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

2011 ◽  
Vol 13 (2) ◽  
pp. 314-320 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
A. Sivasankar Reddy ◽  
Kee-Sun Lee ◽  
P. Sreedhara Reddy
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering
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