Synthesis and characterization of fluorinated amorphous carbon films by reactive magnetron sputtering

2005 ◽  
Vol 14 (3-7) ◽  
pp. 989-993 ◽  
Author(s):  
M. Ishihara ◽  
M. Suzuki ◽  
T. Watanabe ◽  
T. Nakamura ◽  
A. Tanaka ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron ◽  
Amorphous Carbon Films

scholarly journals Synthesis and characterization of single-phase epitaxial Cr2N thin films by reactive magnetron sputtering

2018 ◽  
Vol 54 (2) ◽  
pp. 1434-1442 ◽  
Author(s):  
M. A. Gharavi ◽  
G. Greczynski ◽  
F. Eriksson ◽  
J. Lu ◽  
B. Balke ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Single Phase ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron

scholarly journals Synthesis and characterization of thin amorphous carbon films doped with nitrogen on (001) Si substrates

2016 ◽  
Vol 764 ◽  
pp. 012013 ◽  
Author(s):  
I Balchev ◽  
Kr Tzvetkova ◽  
S Kolev ◽  
P Terziiska ◽  
A Szekeres ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Synthesis And Characterization ◽  
Amorphous Carbon Films ◽  
Si Substrates

The Direct Observation of Fullerene-Like/Onions Dispersed in Amorphous Hydrogenated Carbon Films Deposited by Reactive Magnetron Sputtering of Ni

2015 ◽  
Vol 713-715 ◽  
pp. 2950-2954
Author(s):  
Bin Zhang ◽  
Jun Zhao ◽  
Xue Bin Zheng ◽  
Li Qiang ◽  
Kai Xiong Gao ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Direct Observation ◽  
Amorphous Carbon ◽  
Carbon Matrix ◽  
Carbon Films ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Amorphous Hydrogenated Carbon

Amorphous hydrogenated carbon films deposited by reactive magnetron sputtering showed that nanoNi3C crystals, fullerene-like/onions structures as well as small curved graphenes dispersed in amorphous carbon matrix. It is believed that the migration of Ni atoms leads to the formation of the fullerene-like/onion structures as well as small curved graphenes at high pulsed bias.

Synthesis and Characterization of Nanocrystalline Ti1−xAlxN by Reactive Magnetron Sputtering

2009 ◽  
Vol 9 (9) ◽  
pp. 5451-5454 ◽  
Author(s):  
Feby Jose ◽  
R. Ramaseshan ◽  
S. Dash ◽  
Arup Dasgupta ◽  
S. Saroja ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron
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