Modulation of the microstructure, optical, and electrical properties of HfYO gate dielectrics by annealing temperature
2018 ◽
Vol 735
◽
pp. 1427-1434
◽
2016 ◽
Vol 688
◽
pp. 252-259
◽
2017 ◽
Vol 83
(3)
◽
pp. 675-682
◽
2015 ◽
Vol 70
◽
pp. 840-846
◽
2010 ◽
Vol 25
(1)
◽
pp. 189-196
◽
2019 ◽
Vol 30
(6)
◽
pp. 2258-2265
◽
2011 ◽
Vol 406
(9)
◽
pp. 1653-1659
◽
2015 ◽
Vol 649
◽
pp. 1273-1279
◽