Solution-processed ternary alloy aluminum yttrium oxide dielectric for high performance indium zinc oxide thin-film transistors

2018 ◽  
Vol 741 ◽  
pp. 1021-1029 ◽  
Author(s):  
Jiwon Lee ◽  
Hyeonjoo Seul ◽  
Jae Kyeong Jeong
2017 ◽  
Vol 136 ◽  
pp. 43-50 ◽  
Author(s):  
Yang Song ◽  
Alexander Katsman ◽  
Amy L. Butcher ◽  
David C. Paine ◽  
Alexander Zaslavsky

2008 ◽  
Vol 93 (5) ◽  
pp. 053505 ◽  
Author(s):  
Jaechul Park ◽  
Sangwook Kim ◽  
Changjung Kim ◽  
Sunil Kim ◽  
Ihun Song ◽  
...  

Research ◽  
2021 ◽  
Vol 2021 ◽  
pp. 1-9 ◽  
Author(s):  
Kuankuan Lu ◽  
Rihui Yao ◽  
Wei Xu ◽  
Honglong Ning ◽  
Xu Zhang ◽  
...  

Flexible thin-film transistors with high current-driven capability are of great significance for the next-generation new display technology. The effect of a Cu-Cr-Zr (CCZ) copper alloy source/drain (S/D) electrode on flexible amorphous neodymium-doped indium-zinc-oxide thin-film transistors (NdIZO-TFTs) was investigated. Compared with pure copper (Cu) and aluminum (Al) S/D electrodes, the CCZ S/D electrode changes the TFT working mode from depletion mode to enhancement mode, which is ascribed to the alloy-assisted interface layer besides work function matching. X-ray photoelectron spectroscopy (XPS) depth profile analysis was conducted to examine the chemical states of the contact interface, and the result suggested that chromium (Cr) oxide and zirconium (Zr) oxide aggregate at the interface between the S/D electrode and the active layer, acting as a potential barrier against residual free electron carriers. The optimal NdIZO-TFT exhibited a desired performance with a saturation mobility (μsat) of 40.3 cm2·V-1·s-1, an Ion/Ioff ratio of 1.24×108, a subthreshold swing (SS) value of 0.12 V·decade-1, and a threshold voltage (Vth) of 0.83 V. This work is anticipated to provide a novel approach to the realization of high-performance flexible NdIZO-TFTs working in enhancement mode.


2011 ◽  
Vol 99 (25) ◽  
pp. 253501 ◽  
Author(s):  
Hua Xu ◽  
Linfeng Lan ◽  
Miao Xu ◽  
Jianhua Zou ◽  
Lei Wang ◽  
...  

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