Unintentional boron incorporation in AlGaN layers grown by plasma-assisted MBE using highly efficient nitrogen RF plasma-sources
2017 ◽
Vol 477
◽
pp. 154-158
◽
Keyword(s):
Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
2006 ◽
Vol 45
(10B)
◽
pp. 8046-8049
◽
2004 ◽
Vol 6
(1)
◽
pp. 2135-2140
◽