Factors influencing the Gas Bubble Evolution and the Cristobalite Formation in Quartz Glass Cz Crucibles for Czochralski Growth of Silicon Crystals

2021 ◽  
pp. 126231
Author(s):  
Antje Hirsch ◽  
Manuel Schulze ◽  
Felix Sturm ◽  
Matthias Trempa ◽  
Christian Reimann ◽  
...  
1992 ◽  
Vol 7 (2) ◽  
pp. 352-358 ◽  
Author(s):  
Zhensheng Liu ◽  
Torbjörn Carlberg

Oxygen incorporation in silicon crystals during Czochralski growth is dependent on many factors, of which the dissolution of the silica crucible is of great importance. In this paper the reactions between vitreous silica and molten silicon have been analyzed, both in sealed ampoules and in Czochralski crucibles. It was found that the vitreous silica crystallizes to cristobalite by lateral growth. For this reaction to occur it is necessary that liquid silicon is present. The vitreous silica dissolves and the cristobalite grows with a thin layer of liquid silicon between them. Different oxygen concentrations in the melt in equilibrium with the amorphous and crystallized silica are necessary for the reaction to proceed. The oxygen flux in the melt is dependent upon the dissolution of both vitreous silica and cristobalite as well as the reaction between these phases.


2011 ◽  
Vol 318 (1) ◽  
pp. 249-254 ◽  
Author(s):  
P. Rudolph ◽  
M. Czupalla ◽  
B. Lux ◽  
F. Kirscht ◽  
Ch. Frank-Rotsch ◽  
...  

1988 ◽  
Vol 33 (6) ◽  
pp. 769-779 ◽  
Author(s):  
J.M. Chin Kwie Joe ◽  
L.J.J. Janssen ◽  
S.J.D. van Strelen ◽  
J.H.G. Verbunt ◽  
W.M. Sluyter

2020 ◽  
Vol 184 ◽  
pp. 109867
Author(s):  
Zhihua Xiao ◽  
Yafeng Wang ◽  
Shenyang Hu ◽  
Yulan Li ◽  
San-Qiang Shi

Sign in / Sign up

Export Citation Format

Share Document