Organosilicon compounds as single-source precursors for SiCN films production

Author(s):  
E. Ermakova ◽  
M. Kosinova
2018 ◽  
Vol 480 ◽  
pp. 189-196 ◽  
Author(s):  
Anh H.T. Nguyen ◽  
Jacob L. Tennant ◽  
Leah J. Maxton ◽  
Andrew W. Holland

2011 ◽  
Vol 133 (4) ◽  
pp. 692-694 ◽  
Author(s):  
Anantharamulu Navulla ◽  
Alexander A. Tsirlin ◽  
Artem M. Abakumov ◽  
Roman V. Shpanchenko ◽  
Haitao Zhang ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document