Modeling, fabrication, and structural characterization of thin film ZnO based film bulk acoustic resonator

Materials Today Proceedings ◽

10.1016/j.matpr.2021.01.171 ◽

2021 ◽

Author(s):

Arun Kishor Johar ◽

G.K. Sharma ◽

A. Kumar ◽

Hemant Kumar ◽

T. Varma ◽

...

Keyword(s):

Thin Film ◽

Structural Characterization ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

Ultrasonics ◽

10.1016/j.ultras.2012.04.003 ◽

2013 ◽

Vol 53 (1) ◽

pp. 90-96 ◽

Author(s):

Motoaki Hara ◽

Masanori Ueda ◽

Yoshio Satoh

Keyword(s):

Thin Film ◽

Mass Production ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Fabrication and RF characterization of zinc oxide based Film Bulk Acoustic Resonator

Superlattices and Microstructures ◽

10.1016/j.spmi.2018.04.001 ◽

2018 ◽

Vol 118 ◽

pp. 104-115 ◽

Author(s):

Raju Patel ◽

Deepak Bansal ◽

Vimal Kumar Agrawal ◽

Kamaljit Rangra ◽

Dharmendar Boolchandani

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Simulation study of electrode effect on thin film bulk acoustic resonator for viscosity sensor application

2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) ◽

10.1109/spawda.2017.8340349 ◽

2017 ◽

Author(s):

Hai-qiang Liu ◽

Jing-hui Dai ◽

Jin-hui Zhang ◽

Ling-feng Kong ◽

Li-feng Qin

Keyword(s):

Thin Film ◽

Simulation Study ◽

Acoustic Resonator ◽

Electrode Effect ◽

Sensor Application ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Viscosity Sensor

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Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)

COMPEL The International Journal for Computation and Mathematics in Electrical and Electronic Engineering ◽

10.1108/03321640810905774 ◽

2008 ◽

Vol 27 (6) ◽

pp. 1296-1306 ◽

Author(s):

Concettina Buccella ◽

Valerio De Santis ◽

Mauro Feliziani ◽

Piero Tognolatti

Keyword(s):

Thin Film ◽

Finite Element ◽

Finite Element Modelling ◽

Acoustic Resonator ◽

Element Modelling ◽

Film Bulk Acoustic Resonator ◽

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Spurious Suppression without Energy Dissipation in Aluminum–Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.07gc11 ◽

2012 ◽

Vol 51 ◽

pp. 07GC11 ◽

Author(s):

Motoaki Hara ◽

Hiroki Kuwano

Keyword(s):

Thin Film ◽

Energy Dissipation ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Thin Ring ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Spurious Suppression ◽

Electrode Edge ◽

Without Energy Dissipation

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Highly sensitive detection of organophosphorus pesticides by acetylcholinesterase-coated thin film bulk acoustic resonator mass-loading sensor

Biosensors and Bioelectronics ◽

10.1016/j.bios.2012.08.018 ◽

2013 ◽

Vol 41 ◽

pp. 163-167 ◽

Author(s):

Da Chen ◽

Jingjing Wang ◽

Yan Xu ◽

Dehua Li ◽

Luyin Zhang ◽

...

Keyword(s):

Thin Film ◽

Organophosphorus Pesticides ◽

Acoustic Resonator ◽

Sensitive Detection ◽

Mass Loading ◽

Highly Sensitive ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Highly Sensitive Detection

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AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.08.109 ◽

2010 ◽

Vol 205 (5) ◽

pp. 1279-1286 ◽

Author(s):

G. Wingqvist

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Sputter Deposited ◽

Biosensor Applications

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Multifunctional ZnO-Based Thin-Film Bulk Acoustic Resonator for Biosensors

Journal of Electronic Materials ◽

10.1007/s11664-009-0813-4 ◽

2009 ◽

Vol 38 (8) ◽

pp. 1605-1611 ◽

Author(s):

Ying Chen ◽

Pavel I. Reyes ◽

Ziqing Duan ◽

Gaurav Saraf ◽

Richard Wittstruck ◽

...

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Thin-film bulk acoustic resonator RF bandpass filter design technique using genetic algorithm

Electronics Letters ◽

10.1049/el:20030313 ◽

2003 ◽

Vol 39 (5) ◽

pp. 444 ◽

Author(s):

Jeongheum Lee ◽

Hyeongdong Kim

Keyword(s):

Thin Film ◽

Genetic Algorithm ◽

Bandpass Filter ◽

Filter Design ◽

Acoustic Resonator ◽

Design Technique ◽

Film Bulk Acoustic Resonator ◽

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Sensor for ambient pressure and material strains using a thin film bulk acoustic resonator

IEEE Ultrasonics Symposium, 2005. ◽

10.1109/ultsym.2005.1603080 ◽

2006 ◽

Author(s):

J. Weber ◽

M. Link ◽

R. Primig ◽

D. Pitzer ◽

M. Schreiter

Keyword(s):

Thin Film ◽

Ambient Pressure ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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