Fabrication and RF characterization of zinc oxide based Film Bulk Acoustic Resonator

Superlattices and Microstructures ◽

10.1016/j.spmi.2018.04.001 ◽

2018 ◽

Vol 118 ◽

pp. 104-115 ◽

Author(s):

Raju Patel ◽

Deepak Bansal ◽

Vimal Kumar Agrawal ◽

Kamaljit Rangra ◽

Dharmendar Boolchandani

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Characterization of a high-Q in-liquid longitudinal-mode film bulk acoustic resonator for real-time in-situ monitoring of competitive protein adsorption

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442302 ◽

2010 ◽

Author(s):

Seokheun Choi ◽

Wencheng Xu ◽

Xu Zhang ◽

Junseok Chae

Keyword(s):

Protein Adsorption ◽

Real Time ◽

Longitudinal Mode ◽

Acoustic Resonator ◽

In Situ Monitoring ◽

High Q ◽

Film Bulk Acoustic Resonator ◽

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Thermal Analysis and Characterization of a High Q Film Bulk Acoustic Resonator (FBAR) as Biosensers in Liquids

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805539 ◽

2009 ◽

Author(s):

Xu Zhang ◽

Wencheng Xu ◽

Abbas Abbaspour-Tamijani ◽

Junseok Chae

Keyword(s):

Thermal Analysis ◽

Acoustic Resonator ◽

High Q ◽

Film Bulk Acoustic Resonator ◽

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Modeling, fabrication, and structural characterization of thin film ZnO based film bulk acoustic resonator

Materials Today Proceedings ◽

10.1016/j.matpr.2021.01.171 ◽

2021 ◽

Author(s):

Arun Kishor Johar ◽

G.K. Sharma ◽

A. Kumar ◽

Hemant Kumar ◽

T. Varma ◽

...

Keyword(s):

Thin Film ◽

Structural Characterization ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film

Journal of Applied Physics ◽

10.1063/1.3483245 ◽

2010 ◽

Vol 108 (10) ◽

pp. 104510 ◽

Author(s):

Lifeng Qin ◽

Qing-Ming Wang

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Mass Sensitivity ◽

Film Bulk Acoustic Resonator ◽

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Fabrication and Characterization of ZnO-Based Film Bulk Acoustic Resonator with a High Working Frequency

Chinese Physics Letters ◽

10.1088/0256-307x/22/3/048 ◽

2005 ◽

Vol 22 (3) ◽

pp. 694-696 ◽

Author(s):

Zhang Ting ◽

Wang Yu ◽

Liu Wei-Li ◽

Cheng Jian-Gong ◽

Song Zhi-Tang ◽

...

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Working Frequency ◽

Fabrication And Characterization

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Study on Design and Simulation of Zinc Oxide Based Film Bulk Acoustic Resonator for RF Filters

Physics of Semiconductor Devices - Environmental Science and Engineering ◽

10.1007/978-3-319-03002-9_110 ◽

2014 ◽

pp. 441-443

Author(s):

Jyotirmoy Dutta ◽

Atul Vir Singh ◽

Sonal Singhal ◽

Madhur Deo Upadhayay

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Design and Simulation of a Zinc Oxide Thin Film Bulk Acoustic Resonator Filter for 2.6 GHz Band Applications

IETE Journal of Research ◽

10.1080/03772063.2015.1062734 ◽

2015 ◽

Vol 62 (1) ◽

pp. 3-8 ◽

Author(s):

Jyotirmoy Dutta ◽

Atul Vir Singh ◽

Sonal Singhal ◽

Madhur Deo Upadhayay

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Film Bulk Acoustic Resonator ◽

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Low loss film bulk acoustic resonator in liquid environments

10.32469/10355/6083 ◽

2008 ◽

Author(s):

Sai Sumanth Pottigari

Keyword(s):

Acoustic Resonator ◽

Low Loss ◽

Film Bulk Acoustic Resonator ◽

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Design of a FBAR (Film Bulk Acoustic Resonator) Oscillator at 1.6 GHz

Micro and Nanosystems ◽

10.2174/1876402911103020091 ◽

2011 ◽

Vol 3 (2) ◽

pp. 91-98 ◽

Author(s):

Xu Zhang ◽

Wencheng Xu ◽

Junseok Chae

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

Physica B Condensed Matter ◽

10.1016/j.physb.2007.06.028 ◽

2007 ◽

Vol 400 (1-2) ◽

pp. 38-41 ◽

Author(s):

Zhi Yan ◽

Yi Ming Mi ◽

Zhi Tang Song ◽

Wei Li Liu ◽

Hong Ji ◽

...

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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