scholarly journals In-process diameter measurement technique for nano/micro-optical fiber with standing wave illumination -evaluation of measurement performance

2021 ◽  
Vol 18 ◽  
pp. 100185
Author(s):  
Sojiro Murakami ◽  
Masaki Michihata ◽  
Shotaro Kadoya ◽  
Satoru Takahashi
Keyword(s):  
Optical Fiber ◽  
Standing Wave ◽  
Measurement Technique ◽  
Diameter Measurement

In-process Diameter Measurement for Thin Optical Fiber Using Standing Wave Illumination

2018 ◽  
Vol 2018.12 (0) ◽  
pp. B23
Author(s):  
Zheng ZHAO ◽  
Masaki MICHIHATA ◽  
Kiyoshi TAKAMASU ◽  
Satoru TAKAHASHI
Keyword(s):  
Optical Fiber ◽  
Standing Wave ◽  
Diameter Measurement

scholarly journals In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination

2021 ◽  
Author(s):  
Masaki Michihata ◽  
Zhao Zheng ◽  
Daiki Funaiwa ◽  
Sojiro Murakami ◽  
Shotaro Kadoya ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Standing Wave ◽  
Dynamic Range ◽  
Scattered Light ◽  
High Dynamic Range ◽  
Measurement Range ◽  
Diameter Distribution ◽  
Process Measurement ◽  
Air Turbulence ◽  
Tapered Optical Fiber

AbstractIn this paper, we propose an in-process measurement method of the diameter of micro-optical fiber such as a tapered optical fiber. The proposed technique is based on analyzing optically scattered light generated by standing wave illumination. The proposed method is significant in that it requires an only limited measurement range and does not require a high dynamic range sensor. These properties are suitable for in-process measurement. This experiment verified that the proposed method could measure a fiber diameter as stable as ± 0.01 μm under an air turbulence environment. As a result of comparing the measured diameter distribution with those by scanning electron microscopy, it was confirmed that the proposed method has a measurement accuracy better than several hundred nanometers.

Ripple Technique; a Novel Non-Contact Wafer Emissivity and Temperature Method for RTP

1991 ◽  
Vol 224 ◽  
Author(s):  
C. Schietinger ◽  
B. Adams ◽  
C. Yarling
Keyword(s):  
Optical Fiber ◽  
Measurement Technique ◽  
Thermal Processing ◽  
High Speed ◽  
Rapid Thermal Processing ◽  
Wafer Surface ◽  
Speed Measurement ◽  
Temperature Method ◽  
Emissivity Measurement ◽  
Emissivity Measurements

AbstractA novel wafer temperature and emissivity measurement technique for rapid thermal processing (RTP) is presented. The ‘Ripple Technique’ takes advantage of heating lamp AC ripple as the signature of the reflected component of the radiation from the wafer surface. This application of Optical Fiber Thermometry (OFT) allows high speed measurement of wafer surface temperatures and emissivities. This ‘Ripple Technique’ is discussed in theoretical and practical terms with wafer data presented. Results of both temperature and emissivity measurements are presented for RTP conditions with bare silicon wafers and filmed wafers.

345 Developing a measurement technique of micro bubbles and droplets using an Optical Fiber Probe processed by Femtosecond Pulse Laser

2008 ◽  
Vol 2008.8 (0) ◽  
pp. 89-90
Author(s):  
Yusuke OZAWA ◽  
Keisuke MATSUDA ◽  
Shingo OISHI ◽  
Shin-ichiro AOSHIMA ◽  
Toshiyuki SANADA ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pulse Laser ◽  
Measurement Technique ◽  
Femtosecond Pulse ◽  
Fiber Probe ◽  
Femtosecond Pulse Laser ◽  
Optical Fiber Probe

Optical fiber dispersion measurement technique using a streak camera

1987 ◽  
Vol 5 (1) ◽  
pp. 119-124 ◽  
Author(s):  
K. Mochizuki ◽  
M. Fujise ◽  
M. Kuwazuru ◽  
M. Nunokawa ◽  
Y. Iwamoto
Keyword(s):  
Optical Fiber ◽  
Measurement Technique ◽  
Streak Camera ◽  
Fiber Dispersion ◽  
Dispersion Measurement
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