Evaluation of tuning fork type force transducer for use as a transfer standard

Measurement ◽  
2008 ◽  
Vol 41 (9) ◽  
pp. 941-949 ◽  
Author(s):  
Toshiyuki Hayashi ◽  
Yoshihisa Katase ◽  
Kazunaga Ueda ◽  
Tsuyoshi Hoshino ◽  
Hiroshi Suzawa ◽  
...  
Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1028 ◽  
Author(s):  
Eurico Esteves Moreira ◽  
João Gaspar ◽  
Luis Alexandre Rocha

A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.


2019 ◽  
Vol 52 (3-4) ◽  
pp. 147-158 ◽  
Author(s):  
Wei Liang ◽  
Xiao-xiang Yang ◽  
Jin-hui Yao

The size of the load pad had a significant effect on the output of the column-type force transducer. It was important to eliminate the influence when the transducer was loaded in a force transducer build-up system which worked as the primary force transfer standard. A common model of the output about the column-type force transducer affected by the shape of load pad was analysed. Seven load pads with various dimensions were designed and fixed on a 300-kN force transducer to investigate the influence of the dimension on the indication error of the transducer. The results showed that the load pad of the sphere–plane contact design would cause the smallest indication error but the largest contact stress. It was better to use the load pad of the sphere–sphere contact design with the spherical radius ratio of ball to cup equalled to 0.2. The spherical radius of the ball should be small under the permission of material strength. In addition, it was important to enhance the stiffness of the build-up system to eliminate the effect of the load pad size on the indication error of the transducer.


Measurement ◽  
1990 ◽  
Vol 8 (1) ◽  
pp. 21-30
Author(s):  
G.C. Bussolino ◽  
F. Righini ◽  
A. Rosso

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 286
Author(s):  
Ashfaq Ali ◽  
Naveed Ullah ◽  
Asim Ahmad Riaz ◽  
Muhammad Zeeshan Zahir ◽  
Zuhaib Ali Khan ◽  
...  

Quartz Tuning Fork (QTF) based sensors are used for Scanning Probe Microscopes (SPM), in particular for near-field scanning optical microscopy. Highly sharp Tungsten (W) tips with larger cone angles and less tip diameter are critical for SPM instead of platinum and iridium (Pt/Ir) tips due to their high-quality factor, conductivity, mechanical stability, durability and production at low cost. Tungsten is chosen for its ease of electrochemical etching, yielding high-aspect ratio, sharp tips with tens of nanometer end diameters, while using simple etching circuits and basic electrolyte chemistry. Moreover, the resolution of the SPM images is observed to be associated with the cone angle of the SPM tip, therefore Atomic-Resolution Imaging is obtained with greater cone angles. Here, the goal is to chemically etch W to the smallest possible tip apex diameters. Tips with greater cone angles are produced by the custom etching procedures, which have proved superior in producing high quality tips. Though various methods are developed for the electrochemical etching of W wire, with a range of applications from scanning tunneling microscopy (SPM) to electron sources of scanning electron microscopes, but the basic chemical etching methods need to be optimized for reproducibility, controlling cone angle and tip sharpness that causes problems for the end users. In this research work, comprehensive experiments are carried out for the production of tips from 0.4 mm tungsten wire by three different electrochemical etching techniques, that is, Alternating Current (AC) etching, Meniscus etching and Direct Current (DC) etching. Consequently, sharp and high cone angle tips are obtained with required properties where the results of the W etching are analyzed, with optical microscope, and then with field emission scanning electron microscopy (FE-SEM). Similarly, effects of varying applied voltages and concentration of NaOH solution with comparison among the produced tips are investigated by measuring their cone angle and tip diameter. Moreover, oxidation and impurities, that is, removal of contamination and etching parameters are also studied in this research work. A method has been tested to minimize the oxidation on the surface and the tips were characterized with scanning electron microscope (SEM).


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