Experimental investigation of thin film stress by Stoney’s formula

Measurement ◽

10.1016/j.measurement.2019.04.080 ◽

2019 ◽

Vol 143 ◽

pp. 39-50 ◽

Author(s):

Po-Yu Chen ◽

Wei-Chung Wang ◽

Yen-Ting Wu

Keyword(s):

Thin Film ◽

Experimental Investigation ◽

Film Stress ◽

Thin Film Stress

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Effect of thin-film stress on the formation of Cr texture and on the coercivity of CoCrX/Cr magnetic thin film

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1545476 ◽

2003 ◽

Vol 21 (2) ◽

pp. 454-460 ◽

Author(s):

J. H. Kim ◽

J. K. Park

Keyword(s):

Thin Film ◽

Film Stress ◽

Magnetic Thin Film ◽

Thin Film Stress

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Surface/Interface Stress and Thin Film Stress

Handbook of Mechanics of Materials ◽

10.1007/978-981-10-6855-3_3-1 ◽

2018 ◽

pp. 1-23

Author(s):

Chun-Wei Pao

Keyword(s):

Thin Film ◽

Interface Stress ◽

Film Stress ◽

Thin Film Stress

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Characterizing the spatial uniformity of thin-film stress, modulus, and strength via novel experimental techniques

Microelectronic Engineering ◽

10.1016/s0167-9317(04)00241-2 ◽

2004 ◽

Vol 73-74 ◽

pp. 904-909 ◽

Author(s):

R ENGELSTAD

Keyword(s):

Thin Film ◽

Film Stress ◽

Experimental Techniques ◽

Thin Film Stress ◽

Spatial Uniformity

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Strain compensated thin film stress gauges for stress wave measurements in the presence of lateral strain

Review of Scientific Instruments ◽

10.1063/1.1146024 ◽

1995 ◽

Vol 66 (12) ◽

pp. 5582-5589 ◽

Author(s):

Christopher S. Lynch

Keyword(s):

Thin Film ◽

Stress Wave ◽

Film Stress ◽

Lateral Strain ◽

Thin Film Stress ◽

Wave Measurements

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Effect of grain size on thin film stress and morphology using kinetic Monte Carlo simulations

Journal of Applied Physics ◽

10.1063/5.0023081 ◽

2020 ◽

Vol 128 (14) ◽

pp. 145301

Author(s):

Eric Chason ◽

Piyush Jagtap

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Film Stress ◽

Thin Film Stress ◽

Kinetic Monte Carlo Simulations

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Investigation of Non-equibiaxial Thin Film Stress by Using Stoney Formula

Advancement of Optical Methods in Experimental Mechanics, Volume 3 - Conference Proceedings of the Society for Experimental Mechanics Series ◽

10.1007/978-3-319-41600-7_39 ◽

2016 ◽

pp. 307-319

Author(s):

Wei-Chung Wang ◽

Po-Yu Chen ◽

Yen-Ting Wu

Keyword(s):

Thin Film ◽

Film Stress ◽

Thin Film Stress ◽

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Controlling Thin-Film Stress and Wrinkling during Perovskite Film Formation

ACS Energy Letters ◽

10.1021/acsenergylett.8b00544 ◽

2018 ◽

Vol 3 (6) ◽

pp. 1225-1232 ◽

Author(s):

Kevin A. Bush ◽

Nicholas Rolston ◽

Aryeh Gold-Parker ◽

Salman Manzoor ◽

Jakob Hausele ◽

...

Keyword(s):

Thin Film ◽

Film Formation ◽

Film Stress ◽

Thin Film Stress

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Identification of Thin Film Stress Based on Mindlin-Reissner Plate Finite Element Method

Mechanics of Advanced Materials and Structures ◽

10.1080/15376494.2011.556837 ◽

2012 ◽

Vol 19 (7) ◽

pp. 503-512 ◽

Author(s):

Kang Fu

Keyword(s):

Thin Film ◽

Finite Element Method ◽

Finite Element ◽

Film Stress ◽

Reissner Plate ◽

Thin Film Stress ◽

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Solution Phase Contributions to Cu Thin Film Stress Evolution via In situ Surface Stress Monitoring

ECS Meeting Abstracts ◽

10.1149/ma2011-01/27/1592 ◽

2011 ◽

Keyword(s):

Thin Film ◽

Surface Stress ◽

Solution Phase ◽

Film Stress ◽

Stress Evolution ◽

Stress Monitoring ◽

Thin Film Stress ◽

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Growth of patterned island arrays to identify origins of thin film stress

Journal of Applied Physics ◽

10.1063/1.4870051 ◽

2014 ◽

Vol 115 (12) ◽

pp. 123519 ◽

Author(s):

E. Chason ◽

J. W. Shin ◽

C.-H. Chen ◽

A. M. Engwall ◽

C. M. Miller ◽

...

Keyword(s):

Thin Film ◽

Film Stress ◽

Thin Film Stress

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