Deposition thickness based high-throughput nano-imprint template

2007 ◽  
Vol 84 (4) ◽  
pp. 594-598 ◽  
Author(s):  
Muhammad Mustafa Hussain ◽  
Ed Labelle ◽  
Barry Sassman ◽  
Gabe Gebara ◽  
Sidi Lanee ◽  
...  
2007 ◽  
Vol 177 (4S) ◽  
pp. 52-53
Author(s):  
Stefano Ongarello ◽  
Eberhard Steiner ◽  
Regina Achleitner ◽  
Isabel Feuerstein ◽  
Birgit Stenzel ◽  
...  

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