Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

2007 ◽  
Vol 84 (5-8) ◽  
pp. 1215-1218 ◽  
Author(s):  
Maria Villarroya ◽  
Nuria Barniol ◽  
Cristina Martin ◽  
Francesc Pérez-Murano ◽  
Jaume Esteve ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Ion Etching ◽  
Etching Pattern

Deep reactive ion etching and focused ion beam combination for nanotip fabrication

2006 ◽  
Vol 26 (2-3) ◽  
pp. 164-168 ◽  
Author(s):  
G. Villanueva ◽  
J.A. Plaza ◽  
A. Sánchez-Amores ◽  
J. Bausells ◽  
E. Martínez ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Beam Combination

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

2010 ◽  
Vol 10 (1) ◽  
pp. 497-501 ◽  
Author(s):  
David Caballero ◽  
Guillermo Villanueva ◽  
Jose Antonio Plaza ◽  
Christopher A. Mills ◽  
Josep Samitier ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Afm Tips

scholarly journals Influence of block copolymer feature size on reactive ion etching pattern transfer into silicon

2017 ◽  
Vol 28 (40) ◽  
pp. 404001 ◽  
Author(s):  
M Dialameh ◽  
F Ferrarese Lupi ◽  
D Imbraguglio ◽  
F Zanenga ◽  
A Lamperti ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Feature Size ◽  
Ion Etching ◽  
Etching Pattern

Fabrication of Si microstructures using focused ion beam implantation and reactive ion etching

2008 ◽  
Vol 18 (3) ◽  
pp. 035003 ◽  
Author(s):  
H X Qian ◽  
Wei Zhou ◽  
Jianmin Miao ◽  
Lennie E N Lim ◽  
X R Zeng
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Ion Beam Implantation
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