Combined use of three-dimensional X-ray diffraction imaging and micro-Raman spectroscopy for the non-destructive evaluation of plasma arc induced damage on silicon wafers

2011 ◽  
Vol 88 (1) ◽  
pp. 64-71 ◽  
Author(s):  
J. Stopford ◽  
D. Allen ◽  
O. Aldrian ◽  
M. Morshed ◽  
J. Wittge ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Three Dimensional ◽  
Plasma Arc ◽  
X Ray Diffraction ◽  
X Ray ◽  
Micro Raman Spectroscopy ◽  
Non Destructive Evaluation ◽  
Combined Use ◽  
Diffraction Imaging ◽  
Non Destructive

scholarly journals Application of µ-Raman spectroscopy to the study of the corrosion products of archaeological coins

ACTA IMEKO ◽  
2021 ◽  
Vol 10 (1) ◽  
pp. 234
Author(s):  
Tilde De Caro ◽  
Emma Angelini ◽  
Leila Es Sebar
Keyword(s):  
Raman Spectroscopy ◽  
Analytical Techniques ◽  
Corrosion Products ◽  
Lead Chloride ◽  
X Ray Diffraction ◽  
X Ray ◽  
Micro Raman Spectroscopy ◽  
Experimental Findings ◽  
Non Destructive ◽  
Excavation Site

<p>In this paper, a study of the corrosion products formed on archaeological bronze artefacts excavated in Tharros (Sardinia, Italy) is presented. The investigation was carried out by means of the combination of different analytical techniques, including optical microscopy, micro-Raman spectroscopy (µ-RS), scanning electron microscopy coupled with energy dispersive X-ray spectroscopy and X-ray diffraction. The artefacts under study are three bronze coins from the Phoenician–Punic period that are deeply corroded due to the chloride-rich soil of the Tharros excavation site. µ-Raman spectroscopy was chosen to investigate the corroded surfaces of the artefacts because it is a non-destructive technique, it has high spatial resolution, and it makes it possible to discriminate between polymorphs and correlate colour and chemical composition. Through µ-RS, it was possible to identify different mineralogical phases and different polymorphs, such as cuprite (Cu<sub>2</sub>O), copper trihydroxychloride [Cu<sub>2</sub>Cl(OH)<sub>3</sub>] polymorphs, hydroxy lead chloride laurionite [PbCl(OH)] and calcium carbonate polymorph aragonite. The experimental findings highlight that micro-Raman spectroscopy can be used to provide further knowledge regarding the environmental factors that may cause the degradation of archaeological bronzes in soil.</p>

Three-dimensional X-ray diffraction imaging of process-induced dislocation loops in silicon

2011 ◽  
Vol 44 (3) ◽  
pp. 526-531 ◽  
Author(s):  
David Allen ◽  
Jochen Wittge ◽  
Jennifer Stopford ◽  
Andreas Danilewsky ◽  
Patrick McNally
Keyword(s):  
Semiconductor Industry ◽  
Three Dimensional ◽  
Crystal Defects ◽  
Three Dimensions ◽  
Dimensional Structure ◽  
Dislocation Loops ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Imaging ◽  
Relationship Of

In the semiconductor industry, wafer handling introduces micro-cracks at the wafer edge and the causal relationship of these cracks to wafer breakage is a difficult task. By way of understanding the wafer breakage process, a series of nano-indents were introduced both into 20 × 20 mm (100) wafer pieces and into whole wafers as a means of introducing controlled strain. Visualization of the three-dimensional structure of crystal defects has been demonstrated. The silicon samples were then treated by various thermal anneal processes to initiate the formation of dislocation loops around the indents. This article reports the three-dimensional X-ray diffraction imaging and visualization of the structure of these dislocations. A series of X-ray section topographs of both the indents and the dislocation loops were taken at the ANKA Synchrotron, Karlsruhe, Germany. The topographs were recorded on a CCD system combined with a high-resolution scintillator crystal and were measured by repeated cycles of exposure and sample translation along a direction perpendicular to the beam. The resulting images were then rendered into three dimensions utilizing open-source three-dimensional medical tomography algorithms that show the dislocation loops formed. Furthermore this technique allows for the production of a video (avi) file showing the rotation of the rendered topographs around any defined axis. The software also has the capability of splitting the image along a segmentation line and viewing the internal structure of the strain fields.

Combined synchrotron x-ray diffraction and micro-Raman for following in situ the growth of solution-deposited YBa2Cu3O7 thin films

2005 ◽  
Vol 20 (12) ◽  
pp. 3270-3273 ◽  
Author(s):  
F. Berberich ◽  
H. Graafsma ◽  
B. Rousseau ◽  
A. Canizares ◽  
R. Ramy Ratiarison ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
X Ray Diffraction ◽  
X Ray ◽  
Additional Information ◽  
Micro Raman Spectroscopy ◽  
High Temperature Process ◽  
Structural Growth ◽  
Metal Organic ◽  
Insight Into

A unique combination of in situ synchrotron x-ray diffraction and in situ micro-Raman spectroscopy was used to study the growth process of YBa2Cu3O6+x films obtained by metal organic decomposition using trifluoroacetate precursor on LaAlO3 substrates. The techniques give complementary information: x-ray diffraction gives insight into the structural growth, whereas micro-Raman spectroscopy gives information of the chemical composition with additional information on the texture. To perform both experiments in situ, a special high-temperature process chamber was designed.

NONDESTRUCTIVE THREE-DIMENSIONAL X-RAY DIFFRACTION IMAGING OF NANOSCALE PARTICLES

2008 ◽  
Vol 01 (02) ◽  
pp. 207-220
Author(s):  
ANDREI Y. NIKULIN ◽  
RUBEN A. DILANIAN ◽  
BRIAN M. GABLE ◽  
BURRY C. MUDDLE ◽  
JAMES R. HESTER ◽  
...  
Keyword(s):  
Three Dimensional ◽  
X Ray Diffraction ◽  
Nanoscale Particles ◽  
X Ray ◽  
Diffraction Imaging

Blue halite colour centre aggregates studied by micro-Raman spectroscopy and X-ray diffraction

2012 ◽  
Vol 60 ◽  
pp. 124-128 ◽  
Author(s):  
Aleksandra Wesełucha-Birczyńska ◽  
Sylwia Zelek ◽  
Katarzyna Stadnicka
Keyword(s):  
Raman Spectroscopy ◽  
X Ray Diffraction ◽  
Colour Centre ◽  
X Ray ◽  
Micro Raman Spectroscopy

Incorporating particle symmetry into orientation determination in single-particle imaging

2018 ◽  
Vol 74 (5) ◽  
pp. 512-517
Author(s):  
Miklós Tegze ◽  
Gábor Bortel
Keyword(s):  
Three Dimensional ◽  
Symmetric Case ◽  
X Ray Diffraction ◽  
X Ray ◽  
Coherent Diffraction Imaging ◽  
Diffraction Imaging ◽  
Diffraction Patterns ◽  
Particle Imaging ◽  
Single Particle Imaging ◽  
Orientation Determination

In coherent-diffraction-imaging experiments X-ray diffraction patterns of identical particles are recorded. The particles are injected into the X-ray free-electron laser (XFEL) beam in random orientations. If the particle has symmetry, finding the orientation of a pattern can be ambiguous. With some modifications, the correlation-maximization method can find the relative orientations of the diffraction patterns for the case of symmetric particles as well. After convergence, the correlation maps show the symmetry of the particle and can be used to determine the symmetry elements and their orientations. The C factor, slightly modified for the symmetric case, can indicate the consistency of the assembled three-dimensional intensity distribution.

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