Stencil mask using ultra-violet-curable positive-tone electron beam resist

2019 ◽  
Vol 214 ◽  
pp. 21-27
Author(s):  
Hiroo Maebashi ◽  
Takao Okabe ◽  
Jun Taniguchi
Keyword(s):  
Electron Beam ◽  
Ultra Violet ◽  
Stencil Mask

EPL stencil mask defect inspection system using transmission electron beam

2003 ◽  
Author(s):  
Jiro Yamamoto ◽  
Teruo Iwasaki ◽  
Masaki Yamabe ◽  
Norimichi Anazawa ◽  
Satoru Maruyama ◽  
...  
Keyword(s):  
Electron Beam ◽  
Inspection System ◽  
Defect Inspection ◽  
Transmission Electron ◽  
Stencil Mask

Stencil Mask Technology for Electron-Beam Projection Lithography

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3811-3815 ◽  
Author(s):  
Isao Amemiya ◽  
Hiroshi Yamashita ◽  
Sakae Nakatsuka ◽  
Tadashi Sakurai ◽  
Ikuru Kimura ◽  
...  
Keyword(s):  
Electron Beam ◽  
Projection Lithography ◽  
Stencil Mask ◽  
Beam Projection

Proximity Effect Correction by Pattern Modified Stencil Mask in Large-Field Projection Electron-Beam Lithography

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 6767-6773 ◽  
Author(s):  
Hideo Kobinata ◽  
Hiroshi Yamashita ◽  
Eiichi Nomura ◽  
Ken Nakajima ◽  
Yukinori Kuroki
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Large Field ◽  
Stencil Mask ◽  
Proximity Effect Correction

Vapour deposition of poly(alkyl-2-cyanoacrylate) resist coatings: a new electron-beam/deep-ultra-violet photoresist technology

Polymer ◽  
1989 ◽  
Vol 30 (6) ◽  
pp. 1091-1098 ◽  
Author(s):  
J. Woods ◽  
J. Guthrie ◽  
J. Rooney ◽  
L. Kelly ◽  
A. Doyle ◽  
...  
Keyword(s):  
Electron Beam ◽  
Vapour Deposition ◽  
Ultra Violet
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