Full elemental depth-profiling with nanoscale resolution: The potential of Elastic Recoil Detection (ERD) in membrane science

2019 ◽  
Vol 572 ◽  
pp. 102-109 ◽  
Author(s):  
Rhea Verbeke ◽  
Andreas Bergmaier ◽  
Stephan Eschbaumer ◽  
Hanne Mariën ◽  
Günther Dollinger ◽  
...  
Keyword(s):  
Depth Profiling ◽  
Elastic Recoil ◽  
Elastic Recoil Detection ◽  
Membrane Science ◽  
Elemental Depth

Elemental Depth Profiling of Chlorinated Polyamide-Based Thin-Film Composite Membranes with Elastic Recoil Detection

2019 ◽  
Vol 53 (15) ◽  
pp. 8640-8648 ◽  
Author(s):  
Rhea Verbeke ◽  
Andreas Bergmaier ◽  
Stephan Eschbaumer ◽  
Verónica Gómez ◽  
Günther Dollinger ◽  
...  
Keyword(s):  
Thin Film ◽  
Depth Profiling ◽  
Composite Membranes ◽  
Elastic Recoil ◽  
Film Composite ◽  
Elastic Recoil Detection ◽  
Thin Film Composite ◽  
Elemental Depth

scholarly journals Time-Of-Flight ERDA for Depth Profiling of Light Elements

2020 ◽  
Vol 4 (4) ◽  
pp. 40
Author(s):  
Keisuke Yasuda
Keyword(s):  
Ion Beam ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Semiconductor Detectors ◽  
Light Elements ◽  
Elastic Recoil ◽  
Measurement Sensitivity ◽  
Elastic Recoil Detection ◽  
Detection Analysis

The time-of-flight elastic recoil detection analysis (TOF-ERDA) method is one of the ion beam analysis methods that is capable of analyzing light elements in a sample with excellent depth resolution. In this method, simultaneous measurements of recoil ion energy and time of flight are performed, and ion mass is evaluated. The energy of recoil ions is calculated from TOF, which gives better energy resolution than conventional Silicon semiconductor detectors (SSDs). TOF-ERDA is expected to be particularly applicable for the analysis of light elements in thin films. In this review, the principle of TOF-ERDA measurement and details of the measurement equipment along with the performance of the instrumentation, including depth resolution and measurement sensitivity, are described. Examples of TOF-ERDA analysis are presented with a focus on the results obtained from the measurement system developed by the author.

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